Sub-$μ$ structured Lotus Surfaces Manufacturing

M. Worgull,M. Heckele,T. Mappes,B. Matthis,G. Tosello,T. Metz,J. Gavillet,P. Koltay,H. N. Hansen
DOI: https://doi.org/10.48550/arXiv.0805.0854
2008-05-07
Other Computer Science
Abstract:Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 micrometers high.
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