Fabrication Method of Binary Micro-structure Super-hydrophobic Surface Based on Lotus Effect

Zhang Honghai,Xie Dan,Liu Sheng,Gan Zhiyin
DOI: https://doi.org/10.3321/j.issn:1004-132X.2009.02.019
2009-01-01
Abstract:This paper presented fabrication and replication technology of binary micro-structure based on lotus effect. Aluminum template had been produced by means of anodic oxidation. Plastic micro-channels were pressed with above template by nanoimprinting lithography, furthermore, silicon based bionic functional structures were attained by NIL, reactive ion etching combined silane and alkyl ketene dimmer treatment. According to surface contact angle test results, plastic and Si structure all reveal super-hydrophobic. Therefore, the presented researches results demonstrate the technology is applicable for functional surface shape modification of MEMS including micro-fluidic devices, micro-sensors and micro-actuators, and it has potential applications on reducing friction and preventing stilton.
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