Fabrication of Super-hydrophobic Surfaces for Microfluidic Chips

Jiangang Wu,Ruifeng Yue,HU Huan,Xuefeng Zeng,KANG Ming,WANG Zhe-yao,Litian Liu
2006-01-01
Abstract:For analyses of physical characteristics and applications of the super-hydrophobic surfaces,two theoretical models of droplets on a rough hydrophobic surface was introduced and a technique of the super-hydrophobic surfaces based on MEMS technology was proposed,i.e.,an array of silicon pillars was obtained by ICP etching and Teflon  AF1600 was rotationally coated on the silicon pillar surfaces as the hydrophobic layer to obtain the hydrophobic-controllable surfaces.The results of the contact angles measured indicate that the equilibrium contact angle of deionized water on the flat Teflon  AF1600 film is about 117 °and the apparent contact angle of deionized water on the super-hydrophobic pillars with a length-to-space ratio of 10/35 is about 170 °.Additionally,some parameters for safe design(the length-to-spacer ratio is less than 2.5) were given to avoid appearance of the Wenzel droplets and a manipulation project for controlling microfluidics was proposed by wet gradient.
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