Abstract:This paper reports a novel single-step wafer-level fabrication of superhydrophobic micro/nano dual-scale (MNDS) poly(dimethylsiloxane) (PDMS) films. The MNDS PDMS films were replicated directly from an ultralow-surface-energy silicon substrate at high temperature without any surfactant coating, achieving high precision. An improved deep reactive ion etching (DRIE) process with enhanced passivation steps was proposed to easily realize the ultralow-surface-energy MNDS silicon substrate and also utilized as a post-treatment process to strengthen the hydrophobicity of the MNDS PDMS film. The chemical modification of this enhanced passivation step to the surface energy has been studied by density functional theory, which is also the first investigation of C4F8 plasma treatment at molecular level by using first-principle calculations. From the results of a systematic study on the effect of key process parameters (i.e., baking temperature and time) on PDMS replication, insight into the interaction of hierarchical multiscale structures of polymeric materials during the micro/nano integrated fabrication process is experimentally obtained for the first time. Finite element simulation has been employed to illustrate this new phenomenon. Additionally, hierarchical PDMS pyramid arrays and V-shaped grooves have been developed and are intended for applications as functional structures for a light-absorption coating layer and directional transport of liquid droplets, respectively. This stable, self-cleaning PDMS film with functional micro/nano hierarchical structures, which is fabricated through a wafer-level single-step fabrication process using a reusable silicon mold, shows attractive potential for future applications in micro/nanodevices, especially in micro/nanofluidics.

Facile creation of hierarchical PDMS microstructures with extreme underwater superoleophobicity for anti-oil application in microfluidic channels.

Underwater Superoleophobic Surface Based on Silica Hierarchical Cylinder Arrays with a Low Aspect Ratio

Fabrication of Long-Term Underwater Superoleophobic Al Surfaces and Application on Underwater Lossless Manipulation of Non-Polar Organic Liquids

Fabrication of Ph-Sensitive Superhydrophilic/Underwater Superoleophobic Poly(vinylidene Fluoride)-Graft-(sio2 Nanoparticles and PAMAM Dendrimers) Membranes for Oil-Water Separation.

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Fabrication of mechanically robust superhydrophobic surfaces based on silica micro-nanoparticles and polydimethylsiloxane

Fabrication of Bio-inspired Superamphiphobic Aluminum Alloy Surface with Oil-triggered Wenzel-Slippery Transition via Femtosecond Laser

Fabrication of Super-hydrophobic Surfaces for Microfluidic Chips

Bioinspired spiderweb-liked protective hydrophobic layer for improving the durability of superhydrophilic/air superoleophobic coatings

Super-Hydrophobic PDMS Surface with Ultra-Low Adhesive Force

Fabrication of durable underoil superhydrophobic surfaces with self-cleaning and oil-water separation properties

Janus Fabric with Asymmetric Wettability for Switchable Emulsion Separation and Controllable Droplets with Low Friction

Femtosecond laser fabrication of robust underwater superoleophobic and anti-oil surface on sapphire

Enhancement of Water Repellence by Hierarchical Surface Structures Integrating Micro-dome and Micro-pillar Arrays with Nanoporous Coatings

Self-cleaning Poly(dimethylsiloxane) Film with Functional Micro/nano Hierarchical Structures.

Large-Area Preparation of a Robust Superamphiphobic Coating for Chemical Mechanical Polishing Application

Development of Durable, Fluorine-free, and Transparent Superhydrophobic Surfaces for Oil/Water Separation.

Superefficient and robust polymer coating for bionic manufacturing of superwetting surfaces with “rose petal effect” and “lotus leaf effect”

3D antifouling hierarchical micro/nanostructures with underwater superoleophobicity via one-step electrodeposition on anode and cathode

Uniting Superhydrophobic, Superoleophobic and Lubricating Fluid Infused Slippery Behavior on Copper Oxide Nano-structured Substrates

Durable ER@SiO2@PDMS superhydrophobic composite designed by double crosslinking strategy for efficient oil-water separation