Abstract:Functional nanoporous materials are promising for a number of applications ranging from selective biofiltration to fuel cell electrodes. This work reports the functionalization of nanoporous membranes using atomic layer deposition (ALD). ALD is used to conformally deposit platinum (Pt) and aluminum oxide (Al(2)O(3)) on Pt in nanopores to form a metal-insulator stack inside the nanopore. Deposition of these materials inside nanopores allows the addition of extra functionalities to nanoporous materials such as anodic aluminum oxide (AAO) membranes. Conformal deposition of Pt on such materials enables increased performances for electrochemical sensing applications or fuel cell electrodes. An additional conformal Al(2)O(3) layer on such a Pt film forms a metal-insulator-electrolyte system, enabling field effect control of the nanofluidic properties of the membrane. This opens novel possibilities in electrically controlled biofiltration. In this work, the deposition of these two materials on AAO membranes is investigated theoretically and experimentally. Successful process parameters are proposed for a reliable and cost-effective conformal deposition on high aspect ratio three-dimensional nanostructures. A device consisting of a silicon chip supporting an AAO membrane of 6 mm diameter and 1.3 μm thickness with 80 nm diameter pores is fabricated. The pore diameter is reduced to 40 nm by a conformal deposition of 11 nm Pt and 9 nm Al(2)O(3) using ALD.

Fabrication of Porous Metal Particles with Controlled Surface Structures by Barrel Anode Etching

Fabrication of Porous Aluminum with Controllable Open-Pore Fraction

Fabrication and Application of Nano-Porous Aluminum

Simultaneous Fabrication of Open-Ended Porous Membrane and Microtube Array in One-Step Anodization of Aluminum

Formation Pathways of Porous Alloy Nanoparticles through Selective Chemical and Electrochemical Etching

The Fabrication of Ordered Nanoporous Metal Films Based on High Field Anodic Alumina and Their Selected Transmission Enhancement.

Porous and Ag-, Cu-, Zn-Doped Al2O3 Fabricated via Barrier Anodizing of Pure Al and Alloys

Electrochemical Fabrication Of Novel Nanostructures Based On Anodic Alumina

Nanoporous Gold Thin Film: Fabrication, Structure Evolution, and Electrocatalytic Activity

A Controllable and Widely Applicable Electrochemical Anodization Process to Fabricate Porous Anodic Aluminum Oxide Membrane

A Highly Controllable Electrochemical Anodization Process to Fabricate Porous Anodic Aluminum Oxide Membranes

Nanoporous Metal (cu, Ag, Au) Films with High Surface Area: General Fabrication and Preliminary Electrochemical Performance

Fabrication of micro/nanoporous templates with a novel hierarchical structure by anodization of a patterned aluminum surface

A New Method for Highly Efficient Fabrication of Through-Hole Porous Anodic Alumina Membranes

Fabrication of porous anodic alumina membranes with ultrathick barrier layer

Characterization of Metal Nanoparticles Fabricated in Ordered Array Pores of Anodic Porous Alumina by Electron-Beam-induced Selective Deposition

Fabrication and characterization of anodic films onto the FeCrAl stainless steel in ethylene glycol electrolyte

Fabrication of Nanostructure by Porous Anodic Alumina

Cobalt and Nickel Nanopillars on Aluminium Substrates by Direct Current Electrodeposition Process

Pt-Al2O3 dual layer atomic layer deposition coating in high aspect ratio nanopores

Selective Tungsten Deposition into Ordered Nanohole Arrays of Anodic Porous Alumina by Electron-Beam-induced Deposition