Acoustic and Electromagnetic Co-Modeling of Piezoelectric Devices at Millimeter Wave

Tianyi Zhang,Yen-Wei Chang,Omar Barrera,Naveed Ahmed,Jack Kramer,Ruochen Lu

2024-06-21

Abstract:This work reports the procedure for modeling piezoelectric acoustic resonators and filters at millimeter wave (mmWave). Different from conventional methods for lower frequency piezoelectric devices, we include both acoustic and electromagnetic (EM) effects, e.g., self-inductance, in both the circuit-level fitting and finite element analysis, toward higher accuracy at higher frequencies. To validate the method, thin-film lithium niobate (LiNbO3) first-order antisymmetric (A1) mode devices are used as the testbed, achieving great agreement for both the standalone resonators and a fifth-order ladder filter. Upon further development, the reported acoustic and EM co-modeling could guide the future design of compact piezoelectric devices at mmWave and beyond.

Applied Physics

What problem does this paper attempt to address?

This paper attempts to address the modeling issues of piezoelectric acoustic resonators and filters in the millimeter-wave (mmWave) band. Specifically, unlike traditional low-frequency piezoelectric devices, this study simultaneously considers acoustic effects and electromagnetic (EM) effects, such as self-inductance, in circuit-level fitting and finite element analysis to improve accuracy at high frequencies.

To verify the effectiveness of this method, researchers used the first-order antisymmetric (A1) mode devices of thin-film lithium niobate (LiNbO₃) as a test platform and achieved good consistency, whether for standalone resonators or 5th-order ladder filters. Further developments indicate that this acoustic and electromagnetic co-modeling approach can guide the design of future compact millimeter-wave piezoelectric devices.