CONSTITUTIVE COMPUTATIONAL MODELLING FOUNDATION OF PIEZOELECTRONIC MICROSTRUCTURES AND APPLICATION TO HIGH-FREQUENCY MICROCHIP DSAW RESONATORS

Zhang Wu,Tang Jinchun
DOI: https://doi.org/10.1007/bf02487471
IF: 3.5
2002-01-01
Acta Mechanica Sinica
Abstract:This paper establishes a piezoelectric constitutive computational ap-proach based on generalized eigenvalue and multivariable finite element solutions withpotential applications to accurate and effective analysis of layered piezoelectric mi-crostructures of arbitrary geometries and different anisotropic materials,to ease thelimitation of current computer capacity in analyzing large-scale high-frequency dis-turbed surface acoustic waves(DSAW)by mounted electrodes in piezoelectric devicessuch as microchip SAW resonators.A new incompatible generalized hybrid/mixedelement GQM5 is also proposed for improving predictions of the piezoelectric surfacemount thermal stresses that are shear-dominated.The(generalized)plane strainconstitutive model is numerically verified for piezoelectric finite element computa-tion.With the help of computational piezoelectricity(electro-mechanics)for generallayered structures with metal electrodes and anisotropic piezoelectric substrates,somenew interesting,reliable and fundamental constitutive finite element results are ob-tained for high-frequency piezoelectric and mechanical SAW propagations and can beused for further applications.The ST-cut FEA results agree quite well with availableexact and lab solutions for free surface case.
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