Abstract:The 2-mu m wave band is emerging as a promising spectral window for optical communications and gas sensing. With the increasing demand for components at this wavelength range, developing 2-mu m devices is thus required. Silicon photonics is an ideal device technology as it offers several unique advantages of potential low cost and large scale integration. Besides, the silicon nanowire waveguide is transparent and suffers from negligible two photon absorption at 2-mu m wavelengths. Here, we report the demonstration of grating coupler, waveguide bend, and thermally tunable microring filter on a multi-project wafer which is fabricated using CMOS compatible process. The peak coupling efficiency of the grating coupler is measured to be -8.4 dB at 1952 nm. The bending losses for the rib waveguide and the strip loaded waveguide are measured with different radii. The ring resonator is fabricated and tested with an underestimated Q factor of 1520 (through port) which is due to the limitation of the laser linewidth and wavelength tuning resolution. The extinction ratio exceeds 20 dB and the ring resonance can be thermally tuned by a Titanium Nitride heater. The tuning efficiency is 0.17 nm/mW.

Silicon waveguides and ring resonators at 5.5 μm

Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

High quality waveguides for the mid-infrared wavelength range in a silicon-on-sapphire platform

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Passive Devices at 2 Μm Wavelength on 200 Mm CMOS-compatible Silicon Photonics Platform [Invited]

Mid-infrared Nonlinear Silicon Hybrid Waveguide with High Figure of Merit

Low-Loss Silicon Platform for Broadband Mid-Infrared Photonics

Germanium-On-Silicon Nitride Waveguides for Mid-Infrared Integrated Photonics

Low propagation loss silicon-on-sapphire waveguides for the mid-infrared

Suspended silicon waveguides for long-wave infrared wavelengths

SiN-SOI Multilayer Platform for Prospective Applications at 2 Μm

Low-loss silicon waveguide and an ultrahigh-Q silicon microring resonator in the 2?μm wave band

Long-wave infrared 1 × 2 MMI based on air-gap beneath silicon rib waveguides.

$2-\Mu$ M Wavelength Grating Coupler, Bent Waveguide, and Tunable Microring on Silicon Photonic MPW

Signal Processing in Silicon Waveguides

Novel structure of passive ring waveguide resonator on silicon substrate

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Integrated waveguide coupled ultralow-loss multimode waveguides based on silicon nitride resonators

Characterization and Optimal Design of Silicon-Rich Nitride Nonlinear Waveguides for 2 Μm Wavelength Band

Ultracompact Wavelength-Selective Silicon-Based Plasmonic Components

Low-loss SiGe waveguides for mid-infrared photonics fabricated on 200 mm wafers