Abstract:Although ultrafast laser materials processing has advanced at a breakneck pace over the last two decades, most applications have been developed with laser pulses at near-IR or visible wavelengths. Recent progress in mid-infrared (MIR) femtosecond laser source development may create novel capabilities for material processing. This is because, at high intensities required for such processing, wavelength tuning to longer wavelengths opens the pathway to a special regime of laser-solid interactions. Under these conditions, due to the ${\lambda}^2$ scaling, the ponderomotive energy of laser-driven electrons may significantly exceed photon energy, band gap and electron affinity and can dominantly drive absorption, resulting in a paradigm shift in the traditional concepts of ultrafast laser-solid interactions. Irreversible high-intensity ultrafast MIR laser-solid interactions are of primary interest in this connection, but they have not been systematically studied so far. To address this fundamental gap, we performed a detailed experimental investigation of high-intensity ultrafast modifications of silicon by single femtosecond MIR pulses (${\lambda}$ = 2.7 - 4.2 ${\mu}$m). Ultrafast melting, interaction with silicon-oxide surface layer, and ablation of the oxide and crystal surfaces were ex-situ characterized by scanning electron, atomic-force, and transmission electron microscopy combined with focused ion-beam milling, electron diffractometry, and ${\mu}$-Raman spectroscopy. Laser induced damage and ablation (LIDA) thresholds were measured as functions of laser wavelength. The traditional theoretical models did not reproduce the wavelength scaling of the damage thresholds. To address the disagreement, we discuss possible novel pathways of energy deposition driven by the ponderomotive energy and field effects characteristic of the MIR wavelength regime.

Control of the damage threshold of Si via a SiO2 coating upon irradiation with Mid-IR femtosecond laser pulses

Influence of Antireflection Si coatings on the Damage Threshold of fused silica upon irradiation with Mid-IR femtosecond laser pulses

Traceless Mitigation of Laser Damage Precursors on a Fused Silica Surface by Combining Reactive Ion Beam Etching with Dynamic Chemical Etching

Single-Shot Multi-Stage Damage and Ablation of Silicon by Femtosecond Mid-infrared Laser Pulses

Femtosecond Laser-Induced Damage and Ultrafast Dynamics in Highs Reflection Coating

Ionisation processes and laser induced periodic surface structures in dielectrics with mid-infrared femtosecond laser pulses

Ionization dynamics and damage conditions for transparent materials irradiated with Mid-Infrared femtosecond pulses

Mid-wave Infrared Planar Optical Device Via Femtosecond Laser Ablation on a Sulfur-Based Polymeric Glass Surface

Ultrafast Laser Material Damage Simulation—A New Look at an Old Problem

Incident Laser Modulation of a Repaired Damage Site with a Rim in Fused Silica Rear Subsurface

Damage Growth Characteristics on the Exit Surface of Fused Silica by the Low-Temporal Coherence Light Irradiation.

Damage threshold measurements on EUV optics using focused radiation from a table-top laser produced plasma source

Laser-induced damage thresholds of bulk and coating optical materials at 1030 nm, 500 fs

Study of Laser-Irradiated Thin Films

Tailoring surface topographies on solids with Mid-IR femtosecond laser pulses

The influence of ultrafast temporal energy regulation on the morphology of Si surfaces through femtosecond double pulse laser irradiation

Nanosecond pulsed laser damage characteristics of HfO2/SiO2 high reflection coatings irradiated from crystal-film interface.

Ultrafast laser interaction with transparent multi-layer SiO2/Si3N4 films

Laser Induced Damage Characteristics of Fused Silica Optics Treated by Wet Chemical Processes

Microscopic Mechanisms of Ablation and Micromachining of Dielectrics by Using Femtosecond Lasers

Investigation of Laser-Induced Damage Threshold Improvement Mechanism During Ion Beam Sputtering of Fused Silica