Abstract:Although ultrafast laser materials processing has advanced at a breakneck pace over the last two decades, most applications have been developed with laser pulses at near-IR or visible wavelengths. Recent progress in mid-infrared (MIR) femtosecond laser source development may create novel capabilities for material processing. This is because, at high intensities required for such processing, wavelength tuning to longer wavelengths opens the pathway to a special regime of laser-solid interactions. Under these conditions, due to the ${\lambda}^2$ scaling, the ponderomotive energy of laser-driven electrons may significantly exceed photon energy, band gap and electron affinity and can dominantly drive absorption, resulting in a paradigm shift in the traditional concepts of ultrafast laser-solid interactions. Irreversible high-intensity ultrafast MIR laser-solid interactions are of primary interest in this connection, but they have not been systematically studied so far. To address this fundamental gap, we performed a detailed experimental investigation of high-intensity ultrafast modifications of silicon by single femtosecond MIR pulses (${\lambda}$ = 2.7 - 4.2 ${\mu}$m). Ultrafast melting, interaction with silicon-oxide surface layer, and ablation of the oxide and crystal surfaces were ex-situ characterized by scanning electron, atomic-force, and transmission electron microscopy combined with focused ion-beam milling, electron diffractometry, and ${\mu}$-Raman spectroscopy. Laser induced damage and ablation (LIDA) thresholds were measured as functions of laser wavelength. The traditional theoretical models did not reproduce the wavelength scaling of the damage thresholds. To address the disagreement, we discuss possible novel pathways of energy deposition driven by the ponderomotive energy and field effects characteristic of the MIR wavelength regime.

Tailoring surface topographies on solids with Mid-IR femtosecond laser pulses

Tailoring Sub-micrometer Periodic Surface Structures via Ultrashort Pulsed Direct Laser Interference Patterning

Ionisation processes and laser induced periodic surface structures in dielectrics with mid-infrared femtosecond laser pulses

Micron-scale Modifications Ofsisurface Morphology by Pulsed-Laser Texturing

The influence of ultrafast temporal energy regulation on the morphology of Si surfaces through femtosecond double pulse laser irradiation

Single-Shot Multi-Stage Damage and Ablation of Silicon by Femtosecond Mid-infrared Laser Pulses

Ionization dynamics and damage conditions for transparent materials irradiated with Mid-Infrared femtosecond pulses

Ultrafast laser induced surface modification in absence of non-thermal melting and evaporation

Extreme Sub-Wavelength Structure Formation from Mid-IR Femtosecond Laser Interaction with Silicon

Near-Field-Regulated Ultrafast Laser Supra-Wavelength Structuring Directly on Ultrahard Metallic Glasses

Combined Experimental and Theoretical Study of Femtosecond Laser Based Micro/Nano Machining of Ultra Thin Metallic Films

Surface Nanostructuring by Nano-/Femtosecond Laser-Assisted Scanning Force Microscopy

Nanostructuring of Semiconductor Materials and Metallic Thin Films Using Femtosecond Laser and Scanning Probe Microscope

Liquid-assisted laser nanotexturing of silicon: onset of hydrodynamic processes regulated by laser-induced periodic surface structures

The synergy of electromagnetic effects and thermophysical properties of metals in the formation of laser induced periodic surface structures

The double edged sword of femtosecond laser induced periodic surface structures for sub diffraction and high efficient nanotexturing

Nanoscale reshaping of resonant dielectric microstructures by light-driven explosions

Ultrafast dynamics and sub-wavelength periodic structure formation following irradiation of GaAs with femtosecond laser pulses

Femtosecond Laser Induced Surface Structuring on Silicon by Diffraction-Assisted Micropatterning

Highly uniform silicon nanopatterning with deep-ultraviolet femtosecond pulses

Fundamentals of Scanning Surface Structuring by Ultrashort Laser Pulses: From Electron Diffusion to Final Morphology