Abstract:The effectiveness of ultra-short pulsed laser radiation for high-precision material processing and surface micro-modification, owing to the minimal thermal and mechanical damage, has been shown. Micro/Nano structuring of thin films is gaining widespread importance owing to ever-increasing applications in a variety of fields. The present study details femtosecond laser interaction with ultra thin metallic films at the micro and nano scales. Results of Microablation studies, carried out with an 800nm wavelength, 80fs pulse duration, femtosecond laser focused tightly using a long working distance objective lens, are discussed. A parametric study of single shot ablation and subsequent atomic force microscope characterization of the ablation craters is presented. The formation of elevated convex hillock structures at low laser pulse energies and considerable delamination at higher energies evinces a stress driven modification mechanism. Further, nanostructuring results on thin films carried out with femtosecond laser in conjunction with an atomic force microscope are presented. Various nanofeatures were machined with high spatial resolution (∼10–12nm), flexibility and repeatability by utilizing the local field enhancement in the near-field of the scanning probe tip irradiated with the laser beam. Attempting to understand the modification mechanism and the physics involved, numerical simulation studies were performed to evaluate the field enhancement underneath the tip and the ‘femtosecond laser–thin film’ interaction dynamics in general. Possible applications of thin film structuring may be in the areas of high-resolution nanolithography, controlled nanodeposition, ultra high-density data storage, high-resolution mask production and repair, nanoelectronics, nanophotonics and various nanobiotechnology related applications.

Surface Nanostructuring by Nano-/Femtosecond Laser-Assisted Scanning Force Microscopy

Nanostructuring of Semiconductor Materials and Metallic Thin Films Using Femtosecond Laser and Scanning Probe Microscope

Nanostructuring with Scanning Probe Microscope Tip Irradiated with Femtosecond Laser

Near-Field Nanomodification of Thin Films Using Femtosecond Laser and Atomic Force Microscope

Femtosecond Laser Aperturless Near-Field Nanomachining of Metals Assisted by Scanning Probe Microscopy

Laser microstructuring of Si surfaces for low-threshold field-electron emission

Combined Experimental and Theoretical Study of Femtosecond Laser Based Micro/Nano Machining of Ultra Thin Metallic Films

Near-Field Scanning Optical Microscopy Based Nanostructuring of Glass

Micron-scale Modifications Ofsisurface Morphology by Pulsed-Laser Texturing

Laser-Assisted Nanoprocessing and Growth of Semiconductor Nanostructures

Nanoscale reshaping of resonant dielectric microstructures by light-driven explosions

Nanostructure Fabrication Using Pulsed Lasers Combined with Scanning Probes

Nanometer-Scale Laser Direct-Write Using Near-Field Optics

Study for Laser Controlled Fabrication of Micro/Nano-Structures of Silicon Based on Multi-Physics Model

Femtosecond laser induced surface micro-and nano-structures by orthogonal scanning processing

Large Area Uniform Microstructures on Silicon Surface Created with a Picosecond Laser Beam Scanning

Controllable fabrication of Sub-20nm structures with coupling field tip enhancement effect induced by nanosecond pulsed laser irradiation

Nano-Structures Fabrication by Laser Combined with Near-Field Scanning Optical Microscopy

Microsphere femtosecond laser sub-50 nm structuring in far field via non-linear absorption

In Situ TEM Near-Field Optical Probing of Nanoscale Silicon Crystallization

Laser Assisted Surface Nanopatterning