Abstract:There are wide applications for zonal reconstruction methods in slope-based metrology due to its good capability of reconstructing the local details on surface profile. It was noticed in the literature that large reconstruction errors occur when using zonal reconstruction methods designed for rectangular geometry to process slopes in a quadrilateral geometry, which is a more general geometry with phase measuring deflectometry. In this work, we present a new idea for the zonal methods for quadrilateral geometry. Instead of employing the intermediate slopes to set up height-slope equations, we consider the height increment as a more general connector to establish the height-slope relations for least-squares regression. The classical zonal methods and interpolation-assisted zonal methods are compared with our proposal. Results of both simulation and experiment demonstrate the effectiveness of the proposed idea. In implementation, the modification on the classical zonal methods is addressed. The new methods preserve many good aspects of the classical ones, such as the ability to handle a large incomplete slope dataset in an arbitrary aperture, and the low computational complexity comparable with the classical zonal method. Of course, the accuracy of the new methods is much higher when integrating the slopes in quadrilateral geometry.

Wavefront reconstruction of discontinuous phase objects from optical deflectometry

Wavefront reconstruction for double-grating Ronchi lateral shearing interferometry with nonlinear optimization

Modal-based Nonlinear Optimization Algorithm for Wavefront Measurement with Under-Sampled Data.

Simultaneous Reconstruction of Phase and Amplitude for Wavefront Measurements Based on Nonlinear Optimization Algorithms

Fast Wavefront Sensing Method Based on Diffraction Basis Vectors for Tightly Focused Optical Systems

Modal-based Adaptive Autofocusing Phase Retrieval for Wavefront Measurement

Phase Retrieval Wavefront Measurement Model Based on the Numerical Fourier Theory

Large-scale Phase Retrieval Method for Wavefront Reconstruction with Multi-Stage Random Phase Modulation

Sparse Reconstruction of Wavefronts using an Over-Complete Phase Dictionary

Wavefront-coded phase measuring deflectometry for the all-focused measurement

Joint optimization of wavefront sensing and reconstruction with automatic differentiation

Zonal Wavefront Reconstruction in Quadrilateral Geometry for Phase Measuring Deflectometry.

Wavefront reconstruction of a non-coaxial diffraction model in a lens system.

Adaptive Phase Correction For Phase Measuring Deflectometry Based On Light Field Modulation

Simultaneous Measurement of Double Surfaces of Transparent Lenses with Phase Measuring Deflectometry

An iterative wave-front sensing algorithm for high-contrast imaging systems

Two-frame wavefront reconstruction method with nonlinear optimization for Ronchi lateral shearing interferometry

Collimated Phase Measuring Deflectometry

Wavefront Error Sensing Based on Phase Diversity Technology and Image Restoration

Wavefront Sensing Based on Phase Contrast Theory and Coherent Optical Processing

Phase Error Model and Compensation Method for Reflectivity and Distance Discontinuities in Fringe Projection Profilometry.