Abstract:Phase retrieval (PR) technology can reconstruct the complex amplitude information of the entrance pupil surface from the captured defocus intensity images, and has been successfully applied in many scientific fields such as astronomical observation, biomedical imaging and digital signal restoration. For low numerical aperture (NA) optical systems, the point spread function (PSF) can be calculated using the Fresnel diffraction propagation theory based on Fourier transform, ignoring the polarization field of the light field. However, for high-NA systems, the focal spot not only includes the transverse component, but also the longitudinal component accounts for a proportion that cannot be ignored, thus necessitating a vector model when calculating the PSF in the non-paraxial region. In this paper, the vector diffraction calculation model with arbitrary defocus distance based on the extended Nijboer-Zernike (ENZ) theory is established, which can characterize the light field components in three directions under the Cartesian coordinate system. What's more, a modified Gauss-Newton theory is innovatively applied to the axial phase difference PR model. Compared with the traditional first-order algorithm, the second-order algorithm can reduce the number of iterations. In addition, so as to verify the effectiveness of the proposed method, numerical simulations matching the physical model are carried out, the results show that the proposed method can accurately reconstruction the wavefront with high robustness. In conclusion, the established vector PR model in this paper would provide a creatively guidance for wavefront measurement of high-NA optical systems that is significant in the fields of semiconductor lithography, micro imaging and micro manipulation.

Wavefront reconstruction of a non-coaxial diffraction model in a lens system.

Fast Wavefront Sensing Method Based on Diffraction Basis Vectors for Tightly Focused Optical Systems

Phase Retrieval Wavefront Measurement Model Based on the Numerical Fourier Theory

High-performance Imaging with an Advanced Non-Imaging Lens Based on Full-Path Optical Diffraction Calculation in Two-Dimensional Space

Wavefront reconstruction for double-grating Ronchi lateral shearing interferometry with nonlinear optimization

Coherent Diffractive Imaging Via a Rotatable Cylindrical Lens

Non-propagation Fast Phase Diverse Phase Retrieval for Wavefront Measurement with Generalized FFT-based Basis Function.

Application of Vector Phase Retrieval Model in High Numerical Aperture Optical Systems

Fresnel diffraction method with object wave rotation for numerical reconstruction of digital hologram on tilted plane

Wavefront Reconstruction Based on the Fresnel Zone Plane with Hybrid Focal Lengths

Computational Diffraction-Limited Imaging with a Non-Imaging Spatial Information Transfer Lens

Coherent Diffraction Imaging by Moving a Lens

Image Reconstruction Using Autofocus in Single-Lens System

High-resolution multi-wavelength lensless diffraction imaging with adaptive dispersion correction

Wavefront Reconstruction Error Analysis Method for Diffraction Optical System

A coherent diffraction imaging by using an iterative phase retrieval with multiple patterns at several directions

Wavefront sensing method for diffraction optical system based on phase diversity

Simple Accurate Model-Based Phase Diversity Phase Retrieval Algorithm for Wavefront Sensing in High-Resolution Optical Imaging Systems.

Quantitative Reconstruction of the Complex-Valued Object Based on Complementary Phase Modulations

Analysis of diffraction imaging in non-conjugate configurations.

An iterative wave-front sensing algorithm for high-contrast imaging systems