Abstract:Phase retrieval (PR) technology can reconstruct the complex amplitude information of the entrance pupil surface from the captured defocus intensity images, and has been successfully applied in many scientific fields such as astronomical observation, biomedical imaging and digital signal restoration. For low numerical aperture (NA) optical systems, the point spread function (PSF) can be calculated using the Fresnel diffraction propagation theory based on Fourier transform, ignoring the polarization field of the light field. However, for high-NA systems, the focal spot not only includes the transverse component, but also the longitudinal component accounts for a proportion that cannot be ignored, thus necessitating a vector model when calculating the PSF in the non-paraxial region. In this paper, the vector diffraction calculation model with arbitrary defocus distance based on the extended Nijboer-Zernike (ENZ) theory is established, which can characterize the light field components in three directions under the Cartesian coordinate system. What's more, a modified Gauss-Newton theory is innovatively applied to the axial phase difference PR model. Compared with the traditional first-order algorithm, the second-order algorithm can reduce the number of iterations. In addition, so as to verify the effectiveness of the proposed method, numerical simulations matching the physical model are carried out, the results show that the proposed method can accurately reconstruction the wavefront with high robustness. In conclusion, the established vector PR model in this paper would provide a creatively guidance for wavefront measurement of high-NA optical systems that is significant in the fields of semiconductor lithography, micro imaging and micro manipulation.

Application of Vector Phase Retrieval Model in High Numerical Aperture Optical Systems

Phase Retrieval Wavefront Measurement Model Based on the Numerical Fourier Theory

Modal-based Adaptive Autofocusing Phase Retrieval for Wavefront Measurement

Fast Wavefront Sensing Method Based on Diffraction Basis Vectors for Tightly Focused Optical Systems

Optimization of Transverse Translation Diverse Phase Retrieval for Optical Elements with Mid-Spatial Frequency Errors

Large-scale Phase Retrieval Method for Wavefront Reconstruction with Multi-Stage Random Phase Modulation

Comparative analysis of mid-spatial frequency errors measurement using multiple phase retrieval algorithms

Non-propagation Fast Phase Diverse Phase Retrieval for Wavefront Measurement with Generalized FFT-based Basis Function.

Modal-based Nonlinear Optimization Algorithm for Wavefront Measurement with Under-Sampled Data.

Optimized Phase Retrieval Method Based on Multi-Focus Property of Zone Plate

Simultaneous Reconstruction of Phase and Amplitude for Wavefront Measurements Based on Nonlinear Optimization Algorithms

Simple Accurate Model-Based Phase Diversity Phase Retrieval Algorithm for Wavefront Sensing in High-Resolution Optical Imaging Systems.

Adaptive Optics Based on Linear Phase Retrieval Technique: Numerical Simulation and Experimental Demonstration

Phase retrieval in lens-based Fresnel wave propagation model

Differential Phase Retrieval Based on Phase Modulating for Wavefront Detection

Experimental verification of phase retrieval based on intensity transport equation

Projected Refractive Index Framework for Multi-Wavelength Phase Retrieval.

Preliminary Analysis on Principle and Performance of a Linear Phase-Retrieval Wave Front Measuring Method

Robust Phase Retrieval of Complex-Valued Object in Phase Modulation by Hybrid Wirtinger Flow Method

Optical wavefront measurement using phase retrieval with subaperture stitching method

Accurate phase retrieval of complex point spread functions with deep residual neural networks