Abstract:Phase retrieval (PR) technology can reconstruct the complex amplitude information of the entrance pupil surface from the captured defocus intensity images, and has been successfully applied in many scientific fields such as astronomical observation, biomedical imaging and digital signal restoration. For low numerical aperture (NA) optical systems, the point spread function (PSF) can be calculated using the Fresnel diffraction propagation theory based on Fourier transform, ignoring the polarization field of the light field. However, for high-NA systems, the focal spot not only includes the transverse component, but also the longitudinal component accounts for a proportion that cannot be ignored, thus necessitating a vector model when calculating the PSF in the non-paraxial region. In this paper, the vector diffraction calculation model with arbitrary defocus distance based on the extended Nijboer-Zernike (ENZ) theory is established, which can characterize the light field components in three directions under the Cartesian coordinate system. What's more, a modified Gauss-Newton theory is innovatively applied to the axial phase difference PR model. Compared with the traditional first-order algorithm, the second-order algorithm can reduce the number of iterations. In addition, so as to verify the effectiveness of the proposed method, numerical simulations matching the physical model are carried out, the results show that the proposed method can accurately reconstruction the wavefront with high robustness. In conclusion, the established vector PR model in this paper would provide a creatively guidance for wavefront measurement of high-NA optical systems that is significant in the fields of semiconductor lithography, micro imaging and micro manipulation.

Phase Retrieval Wavefront Measurement Model Based on the Numerical Fourier Theory

Application of Vector Phase Retrieval Model in High Numerical Aperture Optical Systems

Non-propagation Fast Phase Diverse Phase Retrieval for Wavefront Measurement with Generalized FFT-based Basis Function.

Optimization of Transverse Translation Diverse Phase Retrieval for Optical Elements with Mid-Spatial Frequency Errors

Fast Wavefront Sensing Method Based on Diffraction Basis Vectors for Tightly Focused Optical Systems

Modal-based Adaptive Autofocusing Phase Retrieval for Wavefront Measurement

Interferometry Measurement Of Parallel Optical Plate Wavefront

Comparative analysis of mid-spatial frequency errors measurement using multiple phase retrieval algorithms

Large-scale Phase Retrieval Method for Wavefront Reconstruction with Multi-Stage Random Phase Modulation

Modal-based Nonlinear Optimization Algorithm for Wavefront Measurement with Under-Sampled Data.

Simultaneous Reconstruction of Phase and Amplitude for Wavefront Measurements Based on Nonlinear Optimization Algorithms

Optimized Phase Retrieval Method Based on Multi-Focus Property of Zone Plate

Selection of Phase-Recovery Algorithms for Fringe Processing in Optical Measurement of Micro-Surface

Surface Measurement Methods Based on Single and Multi-Frequency Fringes and Its Applications in Reverse Engineering

Wavefront reconstruction for double-grating Ronchi lateral shearing interferometry with nonlinear optimization

Simple Accurate Model-Based Phase Diversity Phase Retrieval Algorithm for Wavefront Sensing in High-Resolution Optical Imaging Systems.

Differential Phase Retrieval Based on Phase Modulating for Wavefront Detection

Focus diverse phase retrieval test results on broadband continuous wavefront sensing in space telescope applications

Phase Retrieval Based Wavefront Sensing Experimental Implementation and Wavefront Sensing Accuracy Calibration

Wavefront reconstruction of a non-coaxial diffraction model in a lens system.

Adaptive Optics Based on Linear Phase Retrieval Technique: Numerical Simulation and Experimental Demonstration