Modal-based Adaptive Autofocusing Phase Retrieval for Wavefront Measurement

Lei Zhao,Jian Bai,Jing Hou
DOI: https://doi.org/10.1117/12.2575015
2020-01-01
Abstract:In the Multi-intensities phase retrieval processing, the measurement uncertainty of the defocus distance undermines its measurement accuracy. In this paper, using a general phase retrieval experimental arrangement, we propose an adaptive autofocusing nonlinear optimization phase retrieval algorithm based on the extended Nijboer-Zernike (ENZ) theory. This method concurrently accomplishes correction of defocusing position error and the wavefront measurement requiring without additional facility. The numerical experiments show that the proposed method accuracy searching for the optimal defocusing position is superior to 10 μm among different measurement planes. The numerical experiments show that the wavefront measurement accuracy with the proposed method is superior to λ/100 , RMSE.
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