Two-frame wavefront reconstruction method with nonlinear optimization for Ronchi lateral shearing interferometry

Runzhou Shi,Huiwen Liu,Yuqi Shao,Tian Zhang,Jian Bai
DOI: https://doi.org/10.1016/j.optcom.2024.130359
IF: 2.4
2024-02-22
Optics Communications
Abstract:Ronchi lateral shearing interferometry is widely applied in wavefront measurement of advanced lithography tools. In Ronchi lateral shearing interferometry, higher-order diffraction beam interference is a common challenge, currently mitigated by introducing more phase shifts, resulting in extended measurement times and added errors. In this study, we propose a nonlinear optimization approach that combines a 2-frame phase-shifting algorithm to suppress the influence of high diffraction orders, reducing the required number of phase shifts by more than 75%. We formulate a numerical model that aligns with the interferometry, construct a highly robust error function, and enable high-precision wavefront reconstruction by optimizing Zernike coefficients. The accuracy and robustness of the proposed method are verified through simulations and experiments.
optics
What problem does this paper attempt to address?