An Ultra-High-Vacuum Rotating Sample Manipulator with Cryogenic Cooling

X. Y. Tee,A. Paré,A. P. Petrović,C. Panagopoulos
DOI: https://doi.org/10.1063/5.0021595
2020-11-05
Abstract:We report a homebuilt ultra-high-vacuum (UHV) rotating sample manipulator with cryogenic cooling. The sample holder is thermally anchored to a built-in cryogenic cold head through flexible copper beryllium strips, permitting continuous sample rotation. A similar contact mechanism is implemented for the electrical wiring to the sample holder for thermometry. The apparatus thus enables continuous sample rotation at regulated cryogenic temperatures in a UHV environment. We discuss the potential applications of this apparatus for cryogenic sputtering.
Instrumentation and Detectors
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