Abstract:Optical waveguides fabricated in single crystals offer crucial passive/active optical components for photonic integrated circuits. Single crystals possess inherent advantages over their amorphous counterpart, such as lower optical losses in visible‐to‐mid‐infrared band, larger peak emission cross‐section, higher doping concentration. However, the writing of Type‐I positive refractive index modified waveguides in single crystals using femtosecond laser technology presents significant challenges. Herein, we introduce a novel femtosecond laser direct writing technique that combines slit‐shaping with an immersion oil objective to fabricate low‐loss Type‐I waveguides in single crystals. This approach allows for precise control of waveguide shape, size, mode‐field and refractive index distribution, with a spatial resolution as high as 700 nm and a high positive refractive index variation on the order of 10−2, introducing new degrees of freedom to design and fabricate passive/active optical waveguide devices. As a proof‐of‐concept, we successfully produced a 7 mm‐long circular‐shaped gain waveguide (∼10 μm in diameter) in an Er3+‐doped YAG single crystal, exhibiting a propagation loss as low as 0.23 dB/cm, a net gain of ∼3 dB and a polarization‐insensitive character. The newly‐developed technique is theoretically applicable to arbitrary single crystals, holding promising potential for various applications in integrated optics, optical communication, and photonic quantum circuits. This article is protected by copyright. All rights reserved

Laser-written integrated photonics in glass-ceramics Zerodur

Optical loss measurements in femtosecond laser written waveguides in glass

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Ultrafast laser inscribed waveguides in tailored fluoride glasses: an enabling technology for mid-infrared integrated photonics devices

High Quality Photonic Devices Directly Written in Gorilla Glass Using a Fs Laser

Mode-tunable Low-Loss Waveguides in Glass for Visible Light Photonic Integrated Devices

Direct laser-writing of ferroelectric single-crystal waveguide architectures in glass for 3D integrated optics

Photonic Circuits Written by Femtosecond Laser in Glass: Improved Fabrication and Recent Progress in Photonic Devices

Integrated multimode optical waveguides in glass using laser induced deep etching

Low-loss optofluidic waveguides in fused silica enabled by spatially shaped femtosecond laser assisted etching combined with carbon dioxide laser irradiation

Low-loss Photonic Device in Ge-Sb-S Chalcogenide Glass.

3D Laser Writing of Low‐Loss Cross‐Section‐Variable Type‐I Optical Waveguide Passive/Active Integrated Devices in Single Crystals

Optical Waveguide Writing Inside Foturan Glass with Femtosecond Laser Pulses

Femtosecond-laser-written Microstructured Waveguides in BK7 Glass

Direct Writing of Channel Optical Waveguides in Er 3+ -Doped Aluminosilicate Glass by Low Repetition Rate Femtosecond Laser

Transverse writing of three-dimensional tubular optical waveguides in glass with a slit-shaped femtosecond laser beam

Ultrafast Laser Direct Writing In Glass: Thermal Accumulation Engineering And Applications

Investigation of ultrafast laser photonic material interactions: challenges for directly written glass photonics

Transverse writing of three-dimensional tubular optical waveguides in glass with slit-shaped femtosecond laser beams

Effectively Writing Low Propagation and Bend Loss Waveguides in the Silica Glass by Using a Femtosecond Laser.

Photonic integrated circuits through femtosecond laser waveguide writing in glass