Quantum well intermixing of tensile strain GaInP quantum well structures induced by ion implantation and thermal annealing

Tao Lin,Ya-ning Li,Jia-nan Xie,Ze-kun Ma,Rong-jin Zhao,Yu-peng Duan
DOI: https://doi.org/10.1016/j.mssp.2021.106306
IF: 4.1
2022-02-01
Materials Science in Semiconductor Processing
Abstract:In this study, it is proposed to implanted nitrogen ions into the high Ga component tensile strain GaInP/AlGaInP quantum well material, resulting in the mixing of quantum well, so as to realize blue-shift of the emission wavelength in the active region. When the annealing temperature is 730 °C, the emission wavelength decreases with the increase of the annealing time. The test results show that the blue-shift is mainly related to ion implantation combined with rapid thermal annealing, and the introduced impurities have an adverse effect on the surface roughness and crystal quality of the material.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied
What problem does this paper attempt to address?