Abstract:<p>An experimental study is conducted to investigate the multi-length scale evolution from micro/nano-structural arrays to V-grooves by femtosecond laser-irradiations, considering the effects of laser polarization and the number of scans on the periodic features and the micro/nano-structures. It is found that the evolution from micro/nano-structural arrays to V-grooves is gradual as the laser fluence, scan speed or the number of scans is increased. Laser-induced surface instability, hatching effects, Coulomb explosions, melting, and evaporation are found to be the underlying mechanisms for the micro/nano structural formation. As the laser fluence increases, the agglomerated nanoparticles change from sparse to dense, so that the boundary between the LIPSS (laser-induced periodic surface structures) becomes less obvious. The oxygen (O) elements attached to the surface of nanoparticles increase with an increase in laser fluence. A high-spatial-frequency LIPSS (HSFL) can transform to low-spatial-frequency LIPSS (LSFL) as the laser fluence excesses the ablation threshold, while the spatial period of the HSFL and LSFL is independent of fluence. It is shown that the irradiated surface evolves from a near-damage-free zone to one with a recast layer and thermal-induced micro-cracks, defined as heat-affected zones (HAZ). Near thermal damage-free micro/nano-structural arrays with different orientations on the sidewalls of the grooves are fabricated at close to the laser ablation threshold by multi-pass scanning. A self-organizing model is developed which shows that laser polarization leads to the asymmetry of energy distribution and the structural array is arranged along the main direction of energy flow. The model analysis shows a good agreement with experimental results and provides an efficient means to understand the interaction between femtosecond laser and silicon carbide (SiC).</p>

Large-area femtosecond laser milling of silicon employing trench analysis

Efficiency of silicon micromachining by femtosecond laser pulses in ambient air

Modifying single-crystal silicon and trimming silicon microring devices by femtosecond laser irradiation

Laser microstructuring of Si surfaces for low-threshold field-electron emission

Highly uniform silicon nanopatterning with deep-ultraviolet femtosecond pulses

Centimeter-scale low-damage micromachining on single-crystal 4H–SiC substrates using a femtosecond laser with square-shaped Flat-Top focus spots

Laser micro/nano machining of silicon

Processing Microgrooves and Craters on the Surface of Wide Band Gap Mold Material Using Femtosecond Laser

One-Step femtosecond laser irradiation of Single-Crystal Silicon: Evolution of Micro-Nano structures and damage investigation

Effects of Parameters in Femtosecond Laser Micromachining on Ablation of Silicon

Femtosecond Laser Percussion Drilling of Silicon Using Repetitive Single Pulse, MHz-, and GHz-Burst Regimes

Thermal and non-thermal ablation mechanisms in crystalline silicon by femtosecond laser pulses: classical approach of the carrier density two temperature model

Nanoscale reshaping of resonant dielectric microstructures by light-driven explosions

High speed and low roughness micromachining of silicon carbide by plasma etching aided femtosecond laser processing

Laser nanofabrication inside silicon with spatial beam modulation and anisotropic seeding

Ablation Threshold and Material Removal Mechanisms of SiC Processed by Femtosecond Laser

Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation

Influence of surface morphology on processing of C/SiC composites via femtosecond laser

Laser nano-fabrication inside silicon with spatial beam modulation and non-local seeding

Direct Writing of Sub-Wavelength Ripples on Silicon Using Femtosecond Laser at High Repetition Rate

Single-Shot Multi-Stage Damage and Ablation of Silicon by Femtosecond Mid-infrared Laser Pulses