Phase and composition analysis of erbium deuteride thin films prepared by magnetron reactive sputtering for proton source target

Y. Chen,J.J. Zhu,C.Y. Zhan
DOI: https://doi.org/10.1016/j.nimb.2024.165558
2024-11-02
Abstract:This study explores the synthesis and characterization of erbium deuteride (ErD x ) thin films using magnetron reactive sputtering (MRS) under varying deuterium gas flow rates. The findings reveal that the stoichiometric ratio of deuterium to erbium (D/Er) can be effectively controlled by adjusting the D 2 flow rate, transitioning compositions from ErD 2 to ErD 3 . All films exhibited a cubic structure, with deuterium atoms occupying both tetrahedral and octahedral sites. Compared to the traditional two-step method, MRS-prepared films showed lower oxidation levels and higher preparation efficiency. Proton-source quality evaluation (PQE) confirmed the suitability of these films as high-quality targets. Additionally, this study introduces a rapid IBA method applicable during PQE, offering a non-destructive and cost-effective means to determine the composition within films.
physics, nuclear, atomic, molecular & chemical,nuclear science & technology,instruments & instrumentation
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