Sputter deposition of bismuth and aluminum substituted dysprosium iron garnet films using sol-gel derived targets

Xiangyang Ma

DOI: https://doi.org/10.1023/A:1008937617849

2000-01-01

Abstract:Bismuth and aluminum substituted dysprosium iron garnet (Bi, Al:DylG) films were prepared by r.f. sputtering using sol-gel derived targets. The sol-gel derived target was coating on a rigid wafer. The coating was derived from the paste formed by a mixture of powders and viscous sol, which were prepared by the sol-gel process using Bi^3 + ,Dy^3 + ,Fe^3 + , and Al^3 + nitrates as precursors, in appropriate stoichiometric ratios of (Dy_3 - xBi_x )(Fe_5 - yAl_y )O_12 . X-ray diffraction (XRD) patterns show that the crystallized films sputtered from the sol-gel derived targets are single phase garnet in nature, indicating that the sol-gel derived target is indeed a feasible alternative to a ceramic target. Magneto-optical measurements show that the prepared garnet film exhibits a strongest Faraday rotation of about 4.5°/μm at a wavelength of 550 nm. It is believed that this sol-gel method for preparing the sputtering targets comprised of multi-component oxides provides a low cost target preparation process.