TEM characterization of an epitaxial CrO 2 film deposited by the CVD method and the transition interface

Xiaoyu Liu,Tianzhong Yang,Peilin Lang,Yuan Yao,Xi Shen,Richeng Yu
DOI: https://doi.org/10.1016/j.matlet.2023.135132
IF: 3
2023-09-07
Materials Letters
Abstract:Epitaxial chromium dioxide (CrO 2 ) film was grown on sapphire Al 2 O 3 by the chemical vapor deposition (CVD) method. The interfacial structure of the epitaxial CrO 2 was characterized by transmission electron microscopy (TEM), and the spatial distribution of the chromium valence in the film was qualitatively analyzed by electron energy loss spectroscopy (EELS). An uneven transition layer with a diffraction pattern consistent with that of Cr 2 O 3 but with an anomalously large oxygen concentration (Cr/O ≈ 0.2–0.3) was found between the CrO 2 film and the substrate.
materials science, multidisciplinary,physics, applied
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