Abstract:Silicon nitride ceramics of high thermal conductivity is a promising candidate for application as ceramic IC substrates. The thermal conductivity of Si3N4 can be changed greatly by the use of different sintering additives. In this work, different systems of additives were used to sinter the silicon nitride ceramics, including Y2O3-MgO, Y2O3-CaO, CeO2-MgO, CeO2-CaO, La2O3-MgO and La2O3-CaO, and their effects on the thermal conductivity and the mechanical and electrical properties of the sintered Si3N4 ceramics were studied. The ceramics were sintered by the spark plasma sintering (SPS) method at 1500 degrees C for 5 min which was then heat treated at 1900 degrees C for 3 h under N-2 atmosphere. Results showed that the conductivities of the ceramics sintered from the rare-earth additives tended to decrease with the increase of the cation radius in the rare-earth oxides. Different from the use of MgO, the additives of CaO did not generate the desired rod-like grains of silicon nitride which thus led to a lower thermal conductivity and a lower strength of the ceramics, although it gave a higher ceramic hardness. In contrast, the Y2O3-MgO additive system, under the optimized sintering conditions, provided a higher thermal conductivity of 80 W//m.K, with the bend strength larger than 1000 MPa. Meanwhile, the bulk resistivity was higher than 10(13)Omega.m, the dielectric constant was lower than 10 and the dielectric dissipation fraction below 3x10(-3).

Dielectric constant, dielectric loss and thermal conductivity of Si3N4 ceramics by hot pressing with CeO2–MgO as sintering aid

Optimization of Microstructure to Improve Si3n4 Ceramics with Thermal Conductivity and Mechanical Properties: Effect of Si and Α-Si3n4 Powder Composition

Mechanical and Dielectric Properties of Si2N2O Ceramics Prepared by Pressureless Sintering

Fabrication of high thermal conductivity silicon nitride ceramics by pressureless sintering with MgO and Y2O3 as sintering additives

Non-additive sintering of Si2N2O ceramic with enhanced high-temperature strength, oxidation resistance, and dielectric properties

Effect of CeO2, Dy2O3, Yb 2O3 and y2O3 additives on thermal conductivity of silicon nitride ceramics

The influence of magnesium compounds on the properties of silicon nitride ceramics

Effect of Multi-Sintering Additive MgO-Al2O3-CeO2 on Densification and Properties of Silicon Nitride Ceramics by Spark Plasma Sintering

Effects of MgSiN2 Addition and Post-Annealing on Mechanical and Thermal Properties of Si3N4 Ceramics

Effect of β-Si<sub>3</sub>N<sub>4</sub> Powder on Thermal Conductivity of Silicon Nitride Ceramics

The Fabrication, Mechanical Property And Oxidation Of Si3n4 Ceramics With Rare Earth Oxide Addition

Effect of Post-Sintering Heat-Treatment on Thermal Conductivity of Si3N4 Ceramics Containing Different Additives

Effect Of Rare-Earth Additives On Thermal Conductivity, Mechanical And Electrical Properties Of Silicon Nitride Ceramics

Hot-pressing sintered AlN-BN ceramics with high thermal conductivity and low dielectric loss

Influence of α-Si3N4 coarse powder on densification, microstructure, mechanical properties, and thermal behavior of silicon nitride ceramics

Silicon Nitride Ceramics with High Thermal Conductivity and Excellent Mechanical Properties Fabricated with MgF2 Sintering Aid and Post Sintering Heat Treatment

Study of the Thermal Conductivity of Si3N4 Sintered with CeO2 and MgO Additives

An investigation on the thermal and microstructural properties of low-cost pressureless sintered silicon nitride (Si3N4) ceramics incorporated with Y2O3-SiO2-MgO

Effect of Er2O3/MgO ratio on mechanical and thermal properties of Si3N4 ceramics

Fabrication of Si 3 N 4 ceramics with high thermal conductivity and flexural strength via novel two-step gas-pressure sintering