Abstract:The concept of metamaterials offers a flexible pathway to manipulate the macroscopic behavior of light by delicately designed microscopic subwavelength structures, which has been recently introduced to integrated photonics to create devices with ultra-compact footprint, excellent performance or versatile functionalities. However, the conventional design approach of metamaterials, including two separated steps of subwavelength structure design and the assembly of unit cells, often encounters challenges when facing extreme design targets. In this work, we propose a hierarchical inverse design approach by cascading a conventional unit-cell-based design with a holistic topology optimization. As a proof-of-concept, we demonstrate ultra-short-range light focusing and mode-size conversion enabled by on-chip meta-lenses. The shortening of tapering region pushes higher numerical aperture of on-chip lenses, leading to the violation of locally periodic approximation used in meta-lens design and thus poor device performance, which fortunately, can be well compensated by the follow-up holistic optimization step. We experimentally realize mode-size squeezing by almost 20 times in a tapering region as short as 8 μm and 5 μm with low insertion loss and broadband performance. The proposed design scheme provides practical guidelines to design metamaterials as flexible on-chip wavefront control and light routing devices for various applications in fiber communication, sensing and optical computing.

Significant crosstalk reduction using all-dielectric CMOS-compatible metamaterials

Reducing crosstalk between nanowire-based hybrid plasmonic waveguides

Topologically-optimized On-Chip Metamaterials for Ultra-Short-range Light Focusing and Mode-Size Conversion

Improved Extinction Ratio of Mach-Zehnder Based Optical Modulators on CMOS Platform

Asymmetric Plasmonic-Dielectric Coupler with Short Coupling Length, High Extinction Ratio, and Low Insertion Loss.

Development of Silicon Photonic Devices for Optical Interconnects

Metamaterial‐Based Maxwell's Fisheye Lens for Multimode Waveguide Crossing

Structurally-tolerant Vertical Directional Coupling Between Metal-Insulator-metal Plasmonic Waveguide and Silicon Dielectric Waveguide

SiN-SOI Multilayer Platform for Prospective Applications at 2 Μm

Compact and Low Cross-Talk Silicon-on-insulator Crossing Using a Periodic Dielectric Waveguide.

Shaping the modal confinement in silicon nanophotonic waveguides through dual-metamaterial engineering

CMOS-compatible zero-index metamaterial (Conference Presentation)

Compact And Low Crosstalk Waveguide Crossing Using Impedance Matched Metamaterial

Exceptional coupling in extreme skin-depth waveguides for extremely low waveguide crosstalk

High performance ultra-compact SOI waveguide crossing.

Ultra-compact high efficiency and low crosstalk optical interconnection structures based on inverse designed nanophotonic elements

Loss and Coupling Tuning via Heterogeneous Integration of MoS2 Layers in Silicon Photonics

Compact and low-crosstalk multimode waveguide crossing utilizing subwavelength holey metamaterial waveguides

Single-step-etched ultra-compact metamaterial grating coupler enabled by a hierarchical inverse design approach

Crosstalk Reduction of Silicon Waveguide Array by High-Reflection Boundary

Edge-guided inverse design of digital metamaterials for ultra-high-capacity on-chip multi-dimensional interconnect