CMOS-compatible zero-index metamaterial (Conference Presentation)

Yang Li,Daryl I Vulis,Orad Reshef,Philip A Camayd-Munoz,Mei Yin,Shota Kita,Marko Loncar,Eric Mazur
2017-01-01
Abstract:Zero-index metamaterials (ZIMs) offer exotic optical properties such as uniform spatial phase and infinite wavelength, as well as photonic applications including super-coupling and omnidirectional phase matching in nonlinear optics. Here we present an on-chip ZIM consisting of a square array of air-holes in a 220-nm-thick silicon-on-insulator (SOI) wafer. This design enables mass production of ZIM-based photonic devices at low cost and high fidelity using standard CMOS fabrication technology. To transition from the high-aspect ratio inverse case of silicon pillars under transverse magnetic (TM) polarization, our design is instead intended for a transverse electric (TE) polarization because of TE modes are, in general, better confined than TM modes for a given thin film. Furthermore, the larger volume fraction of silicon provided by the air-holes structure improves the confinement as compared with the silicon-pillars …
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