CMOS-Compatible Zero-Index Metamaterial

Daryl I. Vulis,Yang Li,Orad Reshef,Mei Yin,Philip Camayd-Munoz,Shota Kita,Marko Loncar,Eric Mazur
DOI: https://doi.org/10.1364/cleo_si.2016.sth3e.8
2016-01-01
Abstract:We present an on-chip Dirac-cone metamaterial with an impedance-matched zero refractive index at λ = 1550nm. The design is a square array of air holes in 220-nm silicon-on-insulator (SOI) which offers compatibility with complementary metal-oxide-semiconductor (CMOS) technology.
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