Rapid manufacture of defect-free microlens arrays by precision glass molding

Asit Kumar Gain,Liangchi Zhang

DOI: https://doi.org/10.1364/ao.526069

IF: 1.9

2024-06-26

Applied Optics

Abstract:Asit Kumar Gain, Liangchi Zhang This paper introduces cost-effective and flexible manufacturing techniques for producing a defect-free microlens array (MLA) using ... [Appl. Opt. 63, 5159-5166 (2024)]

optics

What problem does this paper attempt to address?

Micro Aspheric Glass Lens Molding Process

YIN Shaohui,ZHU Kejun,YU Jianwu,ZHU Yongjian,CHEN Fengjun

DOI: https://doi.org/10.3901/jme.2012.15.182

2012-01-01

Journal of Mechanical Engineering

Abstract:The growth of the consumer electronics industry and a desire for light weight,compact,portable and high performance products has led to an increasing demand for aspherical glass lens.Glass lens molding offers a promising approach for large volume,cost effective production of precision micro aspherical glass lens which is difficult to make using conventional abrasive lens fabrication techniques.The glass lens molding technology is a comprehensive processing strategy and keeps close relations with such fields as optical design,glass materials,ultra-precision mold process,coating,glass molding process,molding simulation and so on.Therefore,it is necessary to make systematic analysis and intensive review on these key technologies which influence the molding quality.The retrospection of the development history and status of glass molding process is presented.The characteristic of optical glass,major components,low melting point and environmental trends are analyzed.The development of mold materials,nano-grinding,ultra-precision polishing,coating materials and coating technology are analyzed.Molding technology status and simulation techniques are analyzed.The development trend is pointed out.
Fabrication of Microglass Lens Mould by Using Ultraprecision Microgrinding Process

Shaohui Yin,Kun Tang,Yongjian Zhu,Fengjun Chen,Yufeng Fan,Li Guo

DOI: https://doi.org/10.1117/12.830785

2009-01-01

Abstract:With the rapid development of information technology and electro-optical communication industry, various micro optical lenses have been used widely. Especially, because of great advantages concerning life, stability and imaging characteristics, the demand for glass lens is increasing the high-precision imaging. This paper studies on the ultra-precision parallel grinding technique of micro glass lens mould and investigates the form error compensation technique in grinding process. Grinding test of micro-lens mould with 10mm in diameter is conducted, and the surface roughness of Ra 5.98nm, Rz 34.95nm and form accuracy of PV 113nm, RMS 23nm are obtained.
Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser

Jiale Yong,Feng Chen,Qing Yang,Guangqing Du,Hao Bian,Dongshi Zhang,Jinhai Si,Feng Yun,Xun Hou

DOI: https://doi.org/10.1021/am402923t

2013-10-09

Abstract:A fast and single-step process is developed for the fabrication of low-cost, high-quality, and large-area concave microlens arrays (MLAs) by the high-speed line-scanning of femtosecond laser pulses. Each concave microlens can be generated by a single laser pulse, and over 2.78 million microlenses were fabricated on a 2 × 2 cm(2) polydimethylsiloxane (PDMS) sheet within 50 min, which greatly enhances the processing efficiency compared to the classical laser direct writing method. The mechanical pressure induced by the expansion of the laser-induced plasmas as well as a long resolidifing time is the reason for the formation of smooth concave spherical microstructures. We show that uniform microlenses with different diameters and depths can be controlled by adjusting the power of laser pulses. Their high-quality optical performance is also demonstrated in this work.
A Framework of Cooperative Design for Aspheric Glass-Lens Mold

Yongjian Zhu,Shaohui Yin,Weiqing Pan,Yufeng Fan,Kun Tang

DOI: https://doi.org/10.4028/www.scientific.net/amr.97-101.2965

2010-01-01

Advanced Materials Research

Abstract:The lens molding technology has become a promising fabrication method for glass lens, especially for aspheric glass lens in batch. Because during the real compression molding, the error compensation for mold shape turns very difficult, the mold needs to be repaired repeatedly to meet the requirements of lens molding. To solve this problem, a cooperative design scheme is proposed. However, the scheme is not limited to solving the mold repairing; it also aims to providing the integrated and optimal design for aspheric glass-lens mold. In fact, the cooperative scheme is a collaborative software platform, which integrates with data processing, optical design, finite element analysis, error compensation and mechanical design for lens molding. On this platform, users only need to submit the (camera) lens parameters or measured data of aspheric lens, and then the platform can provide the final mold drawings, which will be input in the CNC software of ultra-precision machine and guide the mold fabrication. Meanwhile, the cooperative platform is Network-based PDM system, so designers could remotely communicate with it and help to finish the mold design jointly. In this case, the cooperative design could tremendously improve the efficiency and accuracy of lens molding.
Fabrication of a double-sided micro-lens array by a glass molding technique

Chien-Yao Huang,Wen-Tse Hsiao,Kuo-Cheng Huang,Keng-Souo Chang,Hsiao-Yu Chou,Chang-Pin Chou

DOI: https://doi.org/10.1088/0960-1317/21/8/085020

2011-07-12

Journal of Micromechanics and Microengineering

Abstract:In recent years, micro-lens arrays (MLAs) have become important elements of optical systems. One function of MLAs is to create a uniform intensity of light. Compared with one-sided MLAs, the uniformity of light intensity increases with double-sided MLAs. MLAs fabricated by glass can be used in higher temperature environments or in high-energy systems. Glass-based MLAs can be fabricated by laser machining, photolithography, precision diamond grinding process and precision glass molding (PGM) technologies, but laser machining, photolithography and precision diamond grinding process technologies are not the perfect approach for mass production. Therefore, this paper proposes a method to fabricate a mold by laser micro-machining and a double-sided MLA by a PGM process. First, a micro-hole array was fabricated on the surface of a silicon carbide mold. A double-sided MLA using two molds was then formed by a PGM process. In this paper, the PGM process parameters including molding temperature and molding force are discussed. Moreover, the profile of a double-sided MLA is discussed. Finally, a double-sided MLA with a diameter of 20 mm, and lenses with a height of 52 µm, a radius of 851 µm and a pitch of 700 µm were formed on glass.

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Using Micromachined Molds, Partial-curing PDMS Bonding Technique, and Multiple Casting to Create Hybrid Microfluidic Chip for Microlens Array

Pin-Chuan Chen,Ren-Hao Zhang,Liang-Ta Chen

DOI: https://doi.org/10.3390/mi10090572

IF: 3.4

2019-08-29

Micromachines

Abstract:In a previous study, we presented a novel manufacturing process for the creation of 6 × 6 and 8 × 8 microlens arrays (MLAs) comprising lenses with diameters of 1000 μm, 500 μm, and 200 μm within an area that covers 10 mm × 10 mm. In the current study, we revised the manufacturing process to allow for the fabrication of MLAs of far higher density (15 × 15 and 29 × 29 within the same area). In this paper, we detail the revised manufacturing scheme, including the micromachining of molds, the partial-curing polydimethylsiloxane (PDMS) bonding used to fuse the glass substrate and PDMS, and the multi-step casting process. The primary challenges that are involved in creating MLAs of this density were ensuring uniform membrane thickness and preventing leakage between the PDMS and glass substrate. The experiment results demonstrated that the revised fabrication process is capable of producing high density arrays: Design I produced 15 × 15 MLAs with lens diameter of 0.5 mm and fill factor of 47.94%, while Design II produced 29 × 29 MLAs with lens diameter of 0.25 mm and fill factor of 40.87%. The partial-curing PDMS bonding system also proved to be effective in fusing PDMS with glass (maximum bonding strength of approximately six bars). Finally, the redesigned mold was used to create PDMS membranes of high thickness uniformity (coefficient of variance <0.07) and microlenses of high lens height uniformity (coefficient of variance <0.15).

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Soft Mold of Microlens Arrays Fabricated by Surface Self-Assembly

Lina Peng,Bin Sheng,Dong Wang,Jun Shi,Zhengji Ni,Yuanshen Huang

DOI: https://doi.org/10.1016/j.optmat.2019.109602

IF: 3.754

2019-01-01

Optical Materials

Abstract:As a micro-optical element, microlens arrays (MLAs) play an important role in imaging, optical communication, lithography, and sensing. This paper reports a new method of fabricating a soft mold of MLAs by surface self-assembly. First, a hexagonal hole array mask is placed on a polydimethylsiloxane (PDMS) film in a radially pre-stretched state, and the masked PDMS film is irradiated using a scanning UV lamp in air, to form a hexagonal array of a silica-like hard film. Because of the surface self-assembly effect, this array bends inward, yielding a soft mold of concave MLAs after the pre-strain is spontaneously released. The focal length of the MLAs could be controlled in the range of 140-330 mu m with a 37-mu m-diameter hexagonal hole array by varying the exposure time of the ultraviolet ozone. Moreover, the diameter of the hexagonal hole array and the wrinkle wavelength, which are key influencing factors, were systematically studied. The soft mold of MLAs was applied to fabricate replica positive MLAs on planar and curved surfaces, which may have potential applications in image sensing and artificial compound eyes.
An Ultraviolet-Lithography-Assisted Sintering Method for Glass Microlens Array Fabrication

Fangyuan Zuo,Shenghua Ma,Wei Zhao,Chenqian Yang,Ziyu Li,Chen Zhang,Jintao Bai

DOI: https://doi.org/10.3390/mi14112055

IF: 3.4

2023-11-03

Micromachines

Abstract:Glass microlens arrays (MLAs) have tremendous prospects in the fields of optical communication, sensing and high-sensitivity imaging for their excellent optical properties, high mechanical robustness and physicochemical stability. So far, glass MLAs are primarily fabricated using femtosecond laser modification assisted etching, in which the preparation procedure is time-consuming, with each concave-shaped microlens being processed using a femtosecond laser point by point. In this paper, a new method is proposed for implementing large-scale glass MLAs using glass particle sintering with the assistance of ultraviolet (UV) lithography. The glass particles are dispersed into the photoresist at first, and then immobilized as large-scaled micropillar arrays on quartz glass substrate using UV lithographing. Subsequently, the solidified photoresist is debinded and the glass particles are melted by means of sintering. By controlling the sintering conditions, the convex microlens will be self-assembled, attributed to the surface tension of the molten glass particles. Finally, MLAs with different focal lengths (0.12 to 0.2 mm) are successfully fabricated by utilizing different lithography masks. Meanwhile, we also present the optimization of the sintering parameter for eliminating the bubbles in the microlenses. The main factors that affect the focal length of the microlens and the image performance of the MLAs have been studied in detail.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Rapid fabrication of quasi-periodic aspherical concave microlens array with different focal lengths on fused silica by shaping picosecond laser-induced multi-step wet-etching for multi-layer optical imaging

Dejian Kong,Xiaoyan Sun,Limu Zhang,Youwang Hu,Ji-an Duan

DOI: https://doi.org/10.1016/j.optlastec.2024.110688

IF: 4.939

2024-02-20

Optics & Laser Technology

Abstract:Fused-silica-based microlens array (MLA) with different focal lengths is a significant optical element for multi-layer optical imaging. In this paper, we propose shaping picosecond laser-induced multi-step wet-etching to control the morphology of the MLA. A spatial light modulator (SLM) was employed to shape the Gaussian picosecond laser into multiple focal spots with different focal depths. The multiple focal spots induced the ablation regions with different depths inside the fused silica. As a result, the morphologies of the MLA could be controlled from the spherical surface to the aspheric surface. The diameter, sag height, vertex curvature radius, and cone coefficient of the aspheric surface could be readily controlled by the average pulse energy and the focal depths of each focal spot. The ratio between maximum vertex focal length and minimum vertex focal length could be adjusted between 1 and 9.52. Moreover, the patterned MLAs were used for multi-layer imaging and 3D code, which can be applied in optical storage or anti-fake. We believe that shaping picosecond laser induced multi-step wet-etching is a highly efficient and flexible approach to fabricate the micro-optical elements on fused silica.

optics,physics, applied
Fabrication of high aspect-ratio aspheric microlens array based on local spiral diamond milling

Tianfeng Zhou,Jia Zhou,Tianxing Wang,Liheng Gao,Benshuai Ruan,Qian Yu,Wenxiang Zhao,Xibin Wang

DOI: https://doi.org/10.1016/j.jmapro.2022.08.064

IF: 5.684

2022-09-25

Journal of Manufacturing Processes

Abstract:Ultraprecision mold machining combined with precision glass molding is the most promising technology for the mass production of glass microlens arrays (MLAs). However, fabricating an MLA with a high aspect-ratio (AR) (ratio of height to aperture), submicron scale profile accuracy, nanoscale surface finish, and good consistency remains a considerable challenge. A local spiral diamond milling (LSDM) method is proposed to generate a high AR MLA on a nickel-phosphorous (Ni-P) plated mold. A spiral toolpath generation algorithm that considers the tool edge radius and performs profile error (PV) compensation is developed. Each lenslet at any local position can be precisely machined by controlling the servo motions of the three translational axes. Then, the entire MLA can be generated by shifting the toolpath to go through the centers of all lenslets according to the MLA layout. The tool parameters are optimized to avoid local and global tool interference during machining. The generated toolpath provides steady slide axis movements to avoid dramatic changes in cutting speed and acceleration. An MLA with an AR of 0.166 is fabricated. The results show that the fabricated mold and the molded lenses have a profile accuracy (PV) of less than 1 μm and a surface roughness (Ra) of less than 14 nm. The cross-sectional profiles indicate that the fabricated MLA has high machining consistency.

engineering, manufacturing
Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays

Jianwen Gong,Ji Zhou,Junbo Liu,Song Hu,Jian Wang,Haifeng Sun

DOI: https://doi.org/10.3390/mi15020289

IF: 3.4

2024-02-20

Micromachines

Abstract:Microlens arrays, as typical micro-optical elements, effectively enhance the integration and performance of optical systems. The surface shape errors and surface roughness of microlens arrays are the main indicators of their optical characteristics and determine their optical performance. In this study, a mask-moving-projection-lithography-based high-precision surface fabrication method for microlens arrays is proposed, which effectively reduces the surface shape errors and surface roughness of microlens arrays. The pre-exposure technology is used to reduce the development threshold of the photoresist, thus eliminating the impact of the exposure threshold on the surface shape of the microlens. After development, the inverted air bath reflux method is used to bring the microlens array surface to a molten state, effectively eliminating surface protrusions. Experimental results show that the microlens arrays fabricated using this method had a root mean square error of less than 2.8%, and their surface roughness could reach the nanometer level, which effectively improves the fabrication precision for microlens arrays.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Study on Deformation Behavior of Glass in High-temperature Molding for Massive Unit Microlens Arrays

Gang Wang,Tianfeng Zhou,Xiuwen Sun,Liheng Gao,Xiaoqiang Yao,Bin Zhao,Weijia Guo

DOI: https://doi.org/10.1021/acsami.4c10406

2024-08-14

Abstract:Microlens arrays (MLAs) with a large number of units, known as massive unit microlens arrays (MUMLAs), are increasingly sought after for their ability to achieve high-power conversion in infrared optical systems. Precision glass molding (PGM) is considered the ideal manufacturing method for MUMLAs. However, the stress distribution and deformation behavior during molding lack detailed understanding, resulting in poor filling consistency and forming accuracy. Consequently, this leads to inconsistent diffuse spot size and irradiance in MUMLAs. This study aims to comprehensively analyze the glass filling behavior during the molding process of MUMLAs using both simulation and experimental approaches. It explains the impact of glass filling behavior and consistency on the optical performance of MUMLAs. Additionally, the effects of molding parameters on the filling consistency of the lenses are investigated. By optimizing these parameters, a high-consistency 128 × 128 MUMLA is fabricated.
Ultra-precision Manufacturing of Microlens Arrays Using an Optimum Machining Process Chain

Shixiang Wang,Lingbao Kong,Chunjing Wang,Chifai Cheung

DOI: https://doi.org/10.1364/oe.479696

IF: 3.8

2023-01-01

Optics Express

Abstract:There are still significant challenges in the accurate and uniform manufacturing of microlens arrays (MLAs) with advanced ultra-precision diamond cutting technologies due to increasingly stringent requirements and shape complexity. In this paper, an optimum machining process chain is proposed based on the integration of a micro-abrasive fluid jet polishing (MAFJP) process to improve the machining quality by single point diamond turning (SPDT). The MLAs were first machined and compensated by SPDT until the maximum possible surface quality was obtained. The MAFJP was used to correct the surface form error and reduce the nonuniformity for each lens. The polishing characterization was analyzed based on the computational fluid dynamics (CFD) method to enhance the polishing efficiency. To better polish the freeform surface, two-step tool path generation using a regional adaptive path and a raster and cross path was employed. Moreover, the compensation error map was also investigated by revealing the relationship between the material removal mechanism and the surface curvature and polishing parameters. A series of experiments were conducted to prove the reliability and capability of the proposed method. The results indicate that the two integrated machining processes are capable of improving the surface form accuracy with a decrease in PV value from 1.67 µm to 0.56 µm and also elimination of the nonuniform surface error for the lenses.
Microlens arrays prepared via colloidal microsphere templating

Feng Zhao,Mingwei Zhu,Peng Zhan

DOI: https://doi.org/10.3788/COL20100805.0508

IF: 2.56

2010-01-01

Chinese Optics Letters

Abstract:A simple and efficient templating method in combination with hot embossing technique is developed for fabricating large-area two-dimensional (2D) microlens arrays (MLAs) with uniform shape. By utilizing a modified microchannel method, a 2D large-area hexagonal close-packed (HCP) array of silica colloidal microspheres is prepared and serves as a template in the following hot embossing treatment to create a polycarbonate (PC) microcavity array. Then, with the obtained PC microcavity structure serving as a mold, a hot embossing process is applied to finally achieve a polymethylmethacrylate (PMMA) MLA. The effect of annealing time during the mold preparation process on the dimensions and shapes of the prepared microlens is investigated. The imaging performances of the prepared PC concave microcavities and PMMA convex microlenses are characterized by carrying out projection experiments. Our method provides a rapid and low cost approach to prepare large-area MLAs.
One-step Fabrication of Achromatic Spherical Microlens Array on Enzyme Etched Gelatin Film

Jianhua Zhu,Chongwei Jin,Xiaoya Duan,Yongkang Guo,Jun Yao

DOI: https://doi.org/10.1016/j.mee.2008.11.049

IF: 2.3

2009-01-01

Microelectronic Engineering

Abstract:Achromatic spherical microlens array is fabricated successfully on gelatin film by combining the highly efficient techniques of one-step gray-tone photolithography and novel enzyme etched silver-halide-sensitized gelatin. The microlens array has spherically continuous surface relief profile, 100% fill factor and high energy efficiency, and is ready for UV-vis-NIR broadband applications. The gray-tone mask design, reflection-type projection photolithography setup, enzyme etching processing, and the characterization of fabricated 11 x 11 gelatin microlens array, are presented in this paper. (C) 2008 Elsevier B.V. All rights reserved.
Flexible fabrication of optical glass micro-lens array by using contactless hot embossing process

Kangsen Li,Xinfang Huang,Qiang Chen,Gang Xu,Zhiwen Xie,Yuanyuan Wan,Feng Gong

DOI: https://doi.org/10.1016/j.jmapro.2020.07.019

IF: 5.684

2020-09-01

Journal of Manufacturing Processes

Abstract:<p>This paper reported the fabrication of optical glass micro-lens array (MLA) by using contactless micro-embossing technology. Firstly, the micro-hole array in the tungsten carbide (WC) substrate was made by the micro-electrical discharge machining (micro-EDM). Then, to improve the oxidation resistance, anti-sticking properties and chemical inertness of mold surface, Cr-W-N coating was deposited on the mold insert by plasma-enhanced sputtering technique. Finally, controllable MLA were fabricated with the coated EDM-mold by using the precision glass molding machine from Shenzhen University (SZU's PGMM30). The surface roughness, three-dimensional morphology and optical performance of glass MLA were measured by ContourGT-X 3D optical profiler, ultraviolet spectrophotometer, and optical imaging system, respectively. The experimental results indicated that the contactless hot embossing process has the capability of fabricating high-quality and multi-scale glass MLA. This work provides an effective method for the fabrication of optical glass MLA.</p>

engineering, manufacturing
Microlens arrays prepared via colloidal crystal templating

Zhao Feng,Zhu Mingwei,Zhan Peng

DOI: https://doi.org/10.3969/j.issn.2095-2783.2011.06.007

2011-01-01

Abstract:A simple and efficient templating method have been developed for fabricating large-area two-dimensional(2D) microlens arrays(MLAs).By utilizing a modified microchannel method,a 2D large-area hexagonal close-packed(HCP) array of silica colloidal microspheres was prepared and serveed as a template in the following hot embossing treatment to create a polycarbonate(PC) microcavity array.Then,with the obtained PC microcavity structure serving as a mold,a hot embossing process was applied to finally achieve a polymethylmethacrylate(PMMA) MLA.The results showed that,the dimension and shape of the microlens can be tuned by the colloidal sphere sizes and the mold preparation annealing time.Both PC concave microcavities and PMMA convex microlenses showed good imaging performances.Such technique may provide a new avenue for fabrication of microlens arrays.
Direct write of microlens array using digital projection photopolymerization

Yi Lu,Shaochen Chen

DOI: https://doi.org/10.1063/1.2838751

IF: 4

2008-01-28

Applied Physics Letters

Abstract:Microlens array is a key element in the field of information processing, optoelectronics, and integrated optics. Many existing fabrication processes remain expensive and complicated even though relatively low-cost replication processes have been developed. Here, we demonstrate the fabrication of microlens arrays through projection photopolymerization using a digital micromirror device (DMD) as a dynamic photomask. The DMD projects grayscale images, which are designed in a computer, onto a photocurable resin. The resin is then solidified with its thickness determined by a grayscale ultraviolet light and exposure time. Therefore, various geometries can be formed in a single-step, massively parallel fashion. We present microlens arrays made of acrylate-based polymer precursor. The physical and optical characteristics of the resulting lenses suggest that this fabrication technique is potentially suitable for applications in integrated optics.

physics, applied
Formation of micro protrusive lens arrays atop poly(methyl methacrylate).

Yong Zhao,Chang Chun Wang,Wei Min Huang,Hendra Purnawali,Lin An

DOI: https://doi.org/10.1364/OE.19.026000

IF: 3.8

2011-01-01

Optics Express

Abstract:Different sized/shaped micro protrusive lens arrays atop poly(methyl methacrylate) can be fabricated by a simple two-step method, i.e., indentation followed by immersion in ethanol. Profile and projection of obtained microlenses were characterized. Thermal stability of microlenses was examined at 25 degrees C and 60 degrees C. This work demonstrates a cost effective approach for massive fabrication of microlens array with high reliability. (C) 2011 Optical Society of America
Rapid Fabrication Of Continuous Surface Fresnel Microlens Array By Femtosecond Laser Focal Field Engineering

Linyu Yan,Dong Yang,Qihuang Gong,Yan Li

DOI: https://doi.org/10.3390/mi11020112

IF: 3.4

2020-01-01

Micromachines

Abstract:Femtosecond laser direct writing through two-photon polymerization has been widely used in precision fabrication of three-dimensional microstructures but is usually time consuming. In this article, we report the rapid fabrication of continuous surface Fresnel lens array through femtosecond laser three-dimensional focal field engineering. Each Fresnel lens is formed by continuous two-photon polymerization of the two-dimensional slices of the whole structure with one-dimensional scan of the corresponding two-dimensional engineered intensity distribution. Moreover, we anneal the lens array to improve its focusing and imaging performance.

Rapid manufacture of defect-free microlens arrays by precision glass molding

Micro Aspheric Glass Lens Molding Process

Fabrication of Microglass Lens Mould by Using Ultraprecision Microgrinding Process

Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser

A Framework of Cooperative Design for Aspheric Glass-Lens Mold

Fabrication of a double-sided micro-lens array by a glass molding technique

Using Micromachined Molds, Partial-curing PDMS Bonding Technique, and Multiple Casting to Create Hybrid Microfluidic Chip for Microlens Array

Soft Mold of Microlens Arrays Fabricated by Surface Self-Assembly

An Ultraviolet-Lithography-Assisted Sintering Method for Glass Microlens Array Fabrication

Rapid fabrication of quasi-periodic aspherical concave microlens array with different focal lengths on fused silica by shaping picosecond laser-induced multi-step wet-etching for multi-layer optical imaging

Fabrication of high aspect-ratio aspheric microlens array based on local spiral diamond milling

Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays

Study on Deformation Behavior of Glass in High-temperature Molding for Massive Unit Microlens Arrays

Ultra-precision Manufacturing of Microlens Arrays Using an Optimum Machining Process Chain

Microlens arrays prepared via colloidal microsphere templating

One-step Fabrication of Achromatic Spherical Microlens Array on Enzyme Etched Gelatin Film

Flexible fabrication of optical glass micro-lens array by using contactless hot embossing process

Microlens arrays prepared via colloidal crystal templating

Direct write of microlens array using digital projection photopolymerization

Formation of micro protrusive lens arrays atop poly(methyl methacrylate).

Rapid Fabrication Of Continuous Surface Fresnel Microlens Array By Femtosecond Laser Focal Field Engineering