Abstract:This work proposes a liquid-metal-based calorimetric micro-flow sensor within a polydimethylsiloxane (PDMS) chip. It can measure the flow rate of fluid in microscale channels, with a range as low as several microliters per minute. This in-chip sensor is proposed to solve the issue of detecting the flow rate in microfluidic systems. To make the sensor compatible with PDMS microfluidic chips, low-melting-point gallium-based alloy and bismuth-based (bi-based) alloy are used to make the micro heater and bi-metal thermocouples, for these alloys can be easily injected into a PDMS chip to form electrodes. To minimize heat resistance (or temperature difference) between fluid and the detecting ends of thermocouples, these ends are directly exposed to liquid in the flow channel with the help of a special reversible bonding technology. Thermocouples are connected in parallel to improve the sensor's response. A novel method to bond and electrically connect the sensor to a PCB (print circuit board) is also elaborated. Since the calorimetric flow sensor is sensitive to heating power, fluid temperature and environment cooling, a dimensionless parameter less independent of these factors is deduced from heat transfer theory, and this idea is used in result processing to offset the bad effect. Experiments with pure water show that this sensor can be used to detect flow rates, with a resolution up to 4 μl/min/mV and a range of 12 μl/min in this case, and that at different heating powers, the thermal potential results vary significantly whereas the dimensionless results nearly keep the same. Present work indicates that this sensor has the potential to be integrated into a PDMS microfluidic system and to provide accurate and stable results if a dimensionless method is used in data processing.

An Integrated Circuit Compatible Compact Package for Thermal Gas Flowmeters

Single Chip Sensing of Multiple Gas Flows

Non-Silicon MEMS Calorimetric Gas Flow Sensor

Systematic Study of Packaging Designs on the Performance of CMOS Thermoresistive Micro Calorimetric Flow Sensors

Monolithic Integration of a Flexible Micro Thermal Flow Sensor

A Flexible Flow Sensor System And Its Characteristics For Fluid Mechanics Measurements

Design of Thermal Liquid Flow Microsensor

High Performance Bidirectional Thermal Gas Flow Sensor of (100) Silicon Single-Sided Fabrication by 45-Tilted Dicing

A Three-Dimensional Integrated Micro Calorimetric Flow Sensor in CMOS MEMS Technology

Facile In-Tube-Center Packaging of Flexible Airflow Rate Microsensor for Simultaneous Respiration and Heartbeat Measurement

A vacuum/airtight package with multifunctional LTCC substrate and integrated Pirani vacuum gauge for 3D SIP integration applications

A Low-Cost Integrated Micro System for Flow Velocity and Direction Measurement

Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics

Single (111)-Wafer Single-Side Microfabrication of Suspended p + Si/n + Si Thermopile for Tiny-Size and High-Sensitivity Thermal Gas Flow Sensors

On-chip Integration of CMOS IC and Mass Flow Meter

A Front-Side Microfabricated Thermoresistive Gas Flow Sensor for High-Performance, Low-Cost and High-Yield Volume Production

Package Design Thermal Optimization for Metal-Oxide Gas Sensors by Finite Element Modeling and Infra-Red Imaging Characterization

A liquid-metal-based microscale calorimetric in-chip flow sensor for flow rate measuring

A robust flow sensor for high pressure automotive applications

Microfluidic Flowmeter Based on Micro "Hot-Wire" Sandwiched Fabry-Perot Interferometer.

Microfluidic Lab-on-CMOS Packaging Using Wafer-Level Molding and 3D-Printed Interconnects