Abstract:This study explores a new, cost‐effective, compact, and non‐destructive method for characterizing non‐uniform strain fields and material properties in semiconductors using the bulk photovoltage effect. Combining Raman spectroscopy, finite element method calculations, and lateral photovoltage scanning experiments on the benchmark structures of silicon nitride stripes deposited on a germanium substrate, this approach provides insights into strain and transport properties' analysis. Strain engineering serves as an effective method for optimizing electronic and optical properties in semiconductor devices, with applications including the enhancement of optical emission in Ge and GeSn‐based devices, improvement of carrier mobility, and second harmonic generation in silicon photonics structures. Current methods for deformation characterization in semiconductors, such as X‐ray diffraction and Raman spectroscopy, often require bulky and expensive setups and are limited in vertical resolution. Consequently, techniques capable of measuring lattice strain while overcoming these drawbacks are highly desirable. This study proposes a proof of concept for a cost‐effective, compact, fast, and non‐destructive approach to probe non‐uniform strain fields and additional material properties by exploiting the bulk photovoltage effect. The method is benchmarked with an array of silicon nitride stripes deposited under varying pressure conditions on a germanium substrate. Initially, their surface strains are verified through Raman spectroscopy. The deformations are replicated in a finite element method platform by integrating mechanical simulations with deformation potential theory, thereby estimating the band edge energy landscape. Finally, the study discusses the theoretical behavior of the photovoltage signal, considering semiconductor properties, defects, doping, and deformation. The findings offer insights into the development of advanced techniques for strain and transport analysis in semiconductor materials.

Strain mapping in amorphous germanium thin films with scanning reflectance anisotropy microscopy

Strain Engineering for Germanium-on-Insulator Mobility Enhancement with Phase Change Liner Stressors*

Bandgap-customizable germanium using lithographically determined biaxial tensile strain for silicon-compatible optoelectronics

Strain measurement in semiconductor FinFET devices using a novel moiré demodulation technique

Strained germanium thin film membrane on silicon substrate for optoelectronics

XRD Reciprocal Space Mapping of InAsP/InGaAsP/InP Strain Epilayers

High precision two-dimensional strain mapping in semiconductor devices using nanobeam electron diffraction in the transmission electron microscope

On the Bulk Photovoltaic Effect in the Characterization of Strained Germanium Microstructures

Monitoring the Applied Strain in Monolayer Gallium Selenide through Vibrational Spectroscopies: A First-Principles Investigation

Measurement and modeling of strain waves in germanium induced by ultrafast laser pulses

Tuning the Electro-optical Properties of Germanium Nanowires by Tensile Strain

Structural Mapping of Functional Ge Layers Grown on Graded SiGe Buffers for sub-10 nm CMOS Applications Using Advanced X-ray Nanodiffraction

Nanoscale mapping of the full strain tensor, rotation and composition in partially relaxed In$_x$Ga$_{1-x}$N layers by scanning X-ray diffraction microscopy

Real-space Light-Reflection Mapping of Atomically Thin WSe2 Flakes Revealing the Gradient Local Strain

In-Situ Full-Field Strain Measurement at the Sub-grain Scale Using the Scanning Electron Microscope Grid Method

Optical imaging of strain in two-dimensional crystals

Mapping the Strain Distribution Within Embedded Nanoparticles Via Geometrical Phase Analysis.

Spatial mapping of focused surface acoustic waves in the investigation of high frequency strain induced changes

Strain relaxation of GaAs/Ge crystals on patterned Si substrates

Lattice strain and tilt mapping in stressed Ge microstructures using X-ray Laue micro-diffraction and rainbow-filtering