High-frequency surface-micromachined optical ultrasound transducer array for 3D micro photoacoustic computed tomography

Zhiyu Yan,Jun Zou

DOI: https://doi.org/10.1364/ol.505676

IF: 3.6

2024-02-23

Optics Letters

Abstract:Zhiyu Yan, Jun Zou This Letter reports a new, to the best of our knowledge, high-frequency surface-micromachined optical ultrasound transducer (HF-SMOUT) ... [Opt. Lett. 49, 1181-1184 (2024)]

optics

What problem does this paper attempt to address?

Characterization of a broadband all-optical ultrasound transducer-from optical and acoustical properties to imaging

Yang Hou,Jin-Sung Kim,Sheng-Wen Huang,S Ashkenazi,L J Guo,M O'Donnell

DOI: https://doi.org/10.1109/TUFFC.2008.870

Abstract:A broadband all-optical ultrasound transducer has been designed, fabricated, and evaluated for high- frequency ultrasound imaging. The device consists of a 2-D gold nanostructure imprinted on top of a glass substrate, followed by a 3 microm PDMS layer and a 30 nm gold layer. A laser pulse at the resonance wavelength of the gold nanostructure is focused onto the surface for ultrasound generation, while the gold nanostructure, together with the 30 nm thick gold layer and the PDMS layer in between, forms an etalon for ultrasound detection, which uses a CW laser at a wavelength far from resonance as the probing beam. The center frequency of a pulse-echo signal recorded in the far field of the transducer is 40 MHz with -6 dB bandwidth of 57 MHz. The signal to noise ratio (SNR) from a 70 microm diameter transmit element combined with a 20 microm diameter receive element probing a near perfect reflector positioned 1.5 mm from the transducer surface is more than 10 dB and has the potential to be improved by at least another 40 dB. A high-frequency ultrasound array has been emulated using multiple measurements from the transducer while mechanically scanning an imaging target. Characterization of the device's optical and acoustical properties, as well as preliminary imaging results, strongly suggest that all-optical ultrasound transducers can be used to build high-frequency arrays for real-time high-resolution ultrasound imaging.
Fine-Tuning of Optical Resonance Wavelength of Surface-Micromachined Optical Ultrasound Transducer Arrays for Single-Wavelength Light Source Readout

Zhiyu Yan,Cheng Fang,Jun Zou

DOI: https://doi.org/10.3390/mi15091111

IF: 3.4

2024-09-03

Micromachines

Abstract:This article reports the fine-tuning of the optical resonance wavelength (ORW) of surface-micromachined optical ultrasound transducer (SMOUT) arrays to enable ultrasound data readout with non-tunable interrogation light sources for photoacoustic computed tomography (PACT). Permanent ORW tuning is achieved by material deposition onto or subtraction from the top diaphragm of each element with sub-nanometer resolution. For demonstration, a SMOUT array is first fabricated, and its ORW is tuned for readout with an 808 nm laser diode (LD). Experiments are conducted to characterize the optical and acoustic performances of the elements within the center region of the SMOUT array. Two-dimensional and three-dimensional PACT (photoacoustic computed tomography) is also performed to evaluate the imaging performance of the ORW-tuned SMOUT array. The results show that the ORW tuning does not degrade the optical, acoustic, and overall imaging performances of the SMOUT elements. As a result, the fine-tuning method enables new SMOUT-based PACT systems that are low cost, compact, powerful, and even higher speed, with parallel readout capability.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Transparent microfiber Fabry-Perot ultrasound sensor with needle-shaped focus for multiscale photoacoustic imaging

Jun Ma,Jing Zhao,Huiwen Chen,Li-Peng Sun,Jie Li,Bai-Ou Guan

DOI: https://doi.org/10.1016/j.pacs.2023.100482

IF: 9.656

2023-03-29

Photoacoustics

Abstract:Photoacoustic tomography emerged as a promising tool for noninvasive biomedical imaging and diseases diagnosis. However, most of the current piezoelectric ultrasound transducers suffer optical opacity and tissue-mismatched acoustic impedance, hindering the miniaturization and integration of the system for multiscale and multimodal imaging. Here, a transparent polydimethylsiloxane (PDMS) encapsulated optical microfiber ultrasound sensor was demonstrated for photoacoustic imaging with scalable spatial resolution and penetration depth. The sensor comprised a microfiber loop sandwiched by a pair of in-line Bragg gratings, which formed an ultrasound-sensitive Fabry-Perot cavity allowing free delivery of ultrasound/light beams and unique needle-shaped ultrasound focusing along the penetration depth. The sensor with a detection limit of ∼ 700 Pa and a bandwidth of ∼ 10 MHz was applied for multiscale photoacoustic imaging of mouse ear and brain vasculatures. With advantages of flexibility, optical transparence and focusing capability, the sensor offers new opportunities for developing photoacoustic/ultrasound imaging devices for biomedical and clinic applications.

engineering, biomedical,radiology, nuclear medicine & medical imaging,instruments & instrumentation
A Transparent Ultrasound Array for Real-Time Optical, Ultrasound, and Photoacoustic Imaging

Haoyang Chen,Sumit Agrawal,Mohamed Osman,Josiah Minotto,Shubham Mirg,Jinyun Liu,Ajay Dangi,Quyen Tran,Thomas Jackson,Sri-Rajasekhar Kothapalli

DOI: https://doi.org/10.34133/2022/9871098

2022-07-06

BME Frontiers

Abstract:Objective and Impact Statement. Simultaneous imaging of ultrasound and optical contrasts can help map structural, functional, and molecular biomarkers inside living subjects with high spatial resolution. There is a need to develop a platform to facilitate this multimodal imaging capability to improve diagnostic sensitivity and specificity. Introduction . Currently, combining ultrasound, photoacoustic, and optical imaging modalities is challenging because conventional ultrasound transducer arrays are optically opaque. As a result, complex geometries are used to coalign both optical and ultrasound waves in the same field of view. Methods . One elegant solution is to make the ultrasound transducer transparent to light. Here, we demonstrate a novel transparent ultrasound transducer (TUT) linear array fabricated using a transparent lithium niobate piezoelectric material for real-time multimodal imaging. Results . The TUT-array consists of 64 elements and centered at ~6 MHz frequency. We demonstrate a quad-mode ultrasound, Doppler ultrasound, photoacoustic, and fluorescence imaging in real-time using the TUT-array directly coupled to the tissue mimicking phantoms. Conclusion . The TUT-array successfully showed a multimodal imaging capability and has potential applications in diagnosing cancer, neurological, and vascular diseases, including image-guided endoscopy and wearable imaging.
High-Frequency Photoacoustic Measurements in Air

ZQ WANG,SY ZHANG,ZN LU

DOI: https://doi.org/10.1360/ya1991-34-10-1273

1991-01-01

Abstract:A noncontact photoacoustic technique using air transducers in MHz range is presented. Firstly, theoretical simulation and experimental fabrication of ultrasonic transducers in air are considered. An improvement of about 50 dB in the round-trip insertion loss and a fractional bandwidth greater than 15% are obtained by using one or two matching layers. Then, the 1 MHz photoacoustic measurement system is described and different applications are discussed. The phase shifts of the received acoustic waves are extracted to obtain the surface topography of samples. The ion implantation dose in semiconductor is measured by detecting the photoacoustic signal in air. Finally, a photoacoustic method for quantitative determination of thin-film thicknesses is proposed.
Highly sensitive self-focused ultrasound transducer with a bionic back-reflector for multiscale-resolution photoacoustic microscopy

Manli Zhao,Qianyu Zhang,Dongfang Li,Chao Tao,Xiaojun Liu

DOI: https://doi.org/10.1364/oe.513574

IF: 3.8

2024-01-04

Optics Express

Abstract:Manli Zhao, Qianyu Zhang, Dongfang Li, Chao Tao, Xiaojun Liu In this study, we designed a self-focused ultrasonic transducer made of polyvinylidene fluoride (PVDF). This transducer involves a ... [Opt. Express 32, 1501-1511 (2024)]

optics
Three-dimensional Photoacoustic Imaging Via Scanning a One Dimensional Linear Unfocused Ultrasound Array

Yi Tan,Kaiye Xia,Qiushi Ren,Changhui Li

DOI: https://doi.org/10.1364/oe.25.008022

IF: 3.8

2017-01-01

Optics Express

Abstract:Three-dimensional (3D) photoacoustic imaging can be achieved by a two-dimensional (2D) ultrasound array matrix. However, the 2D matrix consisting of hundreds or thousands of transducer elements makes it not only expensive, but also a big technical challenge for both probe manufacturing and parallel data acquisition. In this study, we performed the photoacoustic imaging by scanning an unfocused linear ultrasound array probe over a planar geometry, resulting in an equivalent 2D matrix probe. The phantom study demonstrated that this method substantially increased imaging quality, which has great potential for animal and clinical photoacoustic imaging.
Sub-Nyquist sampling-based high-frequency photoacoustic computed tomography

Songde Liu,Chenxi Zhang,Junyi Zhang,Xingyang Liu,Benpeng Zhu,Chao Tian

DOI: https://doi.org/10.1364/ol.515650

IF: 3.6

2024-03-19

Optics Letters

Abstract:Songde Liu, Chenxi Zhang, Junyi Zhang, Xingyang Liu, Benpeng Zhu, Chao Tian High-frequency (greater than 30?MHz) photoacoustic computed tomography (PACT) provides the opportunity to reveal finer details of ... [Opt. Lett. 49, 1648-1651 (2024)]

optics
Single-side access, isotropic resolution and multispectral 3D photoacoustic imaging with rotate-translate scanning of ultrasonic detector array

Jérôme Gateau,Marc Gesnik,Jean-Marie Chassot,Emmanuel Bossy

DOI: https://doi.org/10.1117/1.JBO.20.5.056004

2015-05-14

Abstract:Photoacoustic imaging can achieve high-resolution three-dimensional visualization of optical absorbers at penetration depths ~ 1 cm in biological tissues by detecting optically-induced high ultrasound frequencies. Tomographic acquisition with ultrasound linear arrays offers an easy implementation of single-side access, parallelized and high-frequency detection, but usually comes with an image quality impaired by the directionality of the detectors. Indeed, a simple translation of the array perpendicularly to its median imaging plane is often used, but results both in a poor resolution in the translation direction and in strong limited view artifacts. To improve the spatial resolution and the visibility of complex structures while keeping a planar detection geometry, we introduce, in this paper, a novel rotate-translate scanning scheme, and investigate the performance of a scanner implemented at 15 MHz center frequency. The developed system achieved a quasi-isotropic uniform 3D resolution of ~170 um over a cubic volume of side length 8.5 mm, i.e. an improvement in the resolution in the translation direction by almost one order of magnitude. Dual wavelength imaging was also demonstrated with ultrafast wavelength shifting. The validity of our approach was shown in vitro. We discuss the ability to enable in vivo imaging for preclinical and clinical studies.

Optics,Medical Physics
Design and Fabrication of a Novel Dual-Frequency Confocal Ultrasound Transducer for Microvessels Super-Harmonic Imaging

Xinqi Deng,Tingnian Xu,Guoming Huang,Qinghao Li,Liyang Luo,Yue Zhao,Zhengjie Wu,Jun Ou-Yang,Xiaofei Yang,Mingxing Xie,Benpeng Zhu

DOI: https://doi.org/10.1109/tuffc.2020.3028505

2021-04-01

Abstract:Recently, super-harmonic ultrasound imaging technology has caused much attention due to its capability of distinguishing microvessels from the tissues surrounding them. However, the fabrication of a dual-frequency confocal transducer is still a challenge. In this work, 270- $mu text{m}$ PMN-PT single crystal 1–3 composite and 28- $mu text{m}$ PVDF thick film, acting as transmission layer and receiving layer, respectively, are integrated in a novel co-focusing structure. To realize delicate wave propagation control, microwave transmission line theory is introduced to design such structure. Two acoustic filter layers, 13- $mu text{m}$ copper layer and 39- $mu text{m}$ Epoxy 301 layer, are indispensable and should be added between two piezoelectric layers. Therefore, an acoustic issue can be overcome via an electrical method and the successful achievement of a dual-frequency (5 MHz/30 MHz) ultrasound transducer with a confocal distance of 8 mm can be realized. The super-harmonic ultrasound imaging experiment is conducted using this kind of device. The 3-D image of 110- $mu text{m}$ -diameter phantom tube injected with microbubbles can be obtained. These promising results demonstrate that this novel dual-frequency (5 MHz/30 MHz) confocal ultrasound transducer is potentially usable for microvascular medical imaging application in the future.
Acousto-optic Tomography Using Amplitude-Modulated Focused Ultrasound and a Near-Ir Laser

Y Yao,D Xing,YH He,K Ueda

DOI: https://doi.org/10.1070/qe2001v031n11abeh002095

2001-01-01

Quantum Electronics

Abstract:A novel tomographic method that can be applied in strongly scattering optical media is proposed. 1-MHz focused ultrasound is used to tag the scattering photons in the biological tissue; it carries a 10-KHz sinusoidal wave to act as a detection wave through amplitude-modulation (AM). The scattering photons that come from the focused zone carry the modulated information. Their opto-electronic signal is demodulated by real-time FFT. By detecting and discriminating ultrasound-modulated information carried by scattered photons, the optical tomographic images of the media simulating biological tissue and of a buried object are reconstructed by the AM spectral intensity. This ultrasound-tagged optical tomography can be applied to tissue structures with different optical parameters. For the first time, by using this method, we obtained the tomographic image of a 5 mm-wide soft rubber cube buried in a biological tissue-simulating media with a detecting depth of 30 mm.
A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging

Yun Zhang,Tong Jin,Yining Deng,Zijie Zhao,Rui Wang,Qiong He,Jianwen Luo,Jiawei Li,Kang Du,Tao Wu,Chenfang Yan,Hao Zhang,Xinchao Lu,Chengjun Huang,Hang Gao

DOI: https://doi.org/10.1038/s41378-024-00755-9

2024-09-12

Abstract:Wearable ultrasound imaging technology has become an emerging modality for the continuous monitoring of deep-tissue physiology, providing crucial health and disease information. Fast volumetric imaging that can provide a full spatiotemporal view of intrinsic 3D targets is desirable for interpreting internal organ dynamics. However, existing 1D ultrasound transducer arrays provide 2D images, making it challenging to overcome the trade-off between the temporal resolution and volumetric coverage. In addition, the high driving voltage limits their implementation in wearable settings. With the use of microelectromechanical system (MEMS) technology, we report an ultrasonic phased-array transducer, i.e., a 2D piezoelectric micromachined ultrasound transducer (pMUT) array, which is driven by a low voltage and is chip-compatible for fast 3D volumetric imaging. By grouping multiple pMUT cells into one single drive channel/element, we propose an innovative cell-element-array design and operation of a pMUT array that can be used to quantitatively characterize the key coupling effects between each pMUT cell, allowing 3D imaging with 5-V actuation. The pMUT array demonstrates fast volumetric imaging covering a range of 40 mm × 40 mm × 70 mm in wire phantom and vascular phantom experiments, achieving a high temporal frame rate of 11 kHz. The proposed solution offers a full volumetric view of deep-tissue disorders in a fast manner, paving the way for long-term wearable imaging technology for various organs in deep tissues.
Whispering-gallery Optical Microprobe for Photoacoustic Imaging

Jialve Sun,Shui-Jing Tang,Jia-Wei Meng,Changhui Li

DOI: https://doi.org/10.1364/prj.495267

IF: 7.6

2023-01-01

Photonics Research

Abstract:Optical ultrasonic probes, exemplified by Fabry–Perot cavities on optical fibers, have small sizes, high sensitivity, and pure optical characteristics, making them highly attractive in high-resolution ultrasonic/photoacoustic imaging, especially in near-field or endoscopic scenarios. Taking a different approach, we demonstrate an ultrasensitive and broadband ultrasound microprobe formed by an optical whispering-gallery-mode polymer microcavity coupled to a U-shaped microfiber. With the high-quality (Q) factors (>106), the noise equivalent pressure of the ultrasound microprobe reaches 1.07 mPa/√Hz with a record broadband response of 150 MHz and a large detection angle of 180°. Our results show that this optical microprobe can overcome the strong decay resulting from ultrasound diverging and medium absorption through short working distances. We further demonstrate high-quality in vivo whole-body photoacoustic imaging of a zebrafish larva. Our implementation provides a new strategy for developing miniature ultrasound detectors and holds great potential for broad applications.
Photoacoustic raster scan imaging using an optomechanical ultrasound sensor in silicon photonics

Cedric Pieters,Wouter J. Westerveld,Hasan Mahmud-Ul-Hasan,Simone Severi,Jon Kjellman,Roelof Jansen,Veronique Rochus,Xavier Rottenberg,Wouter Westerveld,Md. . Mahmud-Ul-Hasan

DOI: https://doi.org/10.1117/12.2607501

2022-03-03

Abstract:Photoacoustic tomography defines new challenges for ultrasound detection compared to ultrasonography. To address these challenges, a sensitive, small, scalable, and broadband optomechanical ultrasound sensor (OMUS) has been developed. The OMUS is an on-chip optical ultrasound sensor, using optical interferometric ultrasound detection. It consists of an acoustic membrane on top of an optical ring resonator that modulates the optical ring resonance with high efficiency enabled by an innovative optomechanical waveguide. Raster scanning photoacoustic tomography has been demonstrated with a single-element OMUS. Based on performance and form factor, the OMUS combined with passive optical multiplexing may enable new applications in photoacoustic imaging
Ultrafast 3-D Super Resolution Ultrasound using Row-Column Array specific Coherence-based Beamforming and Rolling Acoustic Sub-aperture Processing: In Vitro, In Vivo and Clinical Study

Joseph Hansen-Shearer,Jipeng Yan,Marcelo Lerendegui,Biao Huang,Matthieu Toulemonde,Kai Riemer,Qingyuan Tan,Johanna Tonko,Peter D. Weinberg,Chris Dunsby,Meng-Xing Tang

2023-11-15

Abstract:The row-column addressed array is an emerging probe for ultrafast 3-D ultrasound imaging. It achieves this with far fewer independent electronic channels and a wider field of view than traditional 2-D matrix arrays, of the same channel count, making it a good candidate for clinical translation. However, the image quality of row-column arrays is generally poor, particularly when investigating tissue. Ultrasound localisation microscopy allows for the production of super-resolution images even when the initial image resolution is not high. Unfortunately, the row-column probe can suffer from imaging artefacts that can degrade the quality of super-resolution images as `secondary' lobes from bright microbubbles can be mistaken as microbubble events, particularly when operated using plane wave imaging. These false events move through the image in a physiologically realistic way so can be challenging to remove via tracking, leading to the production of 'false vessels'. Here, a new type of rolling window image reconstruction procedure was developed, which integrated a row-column array-specific coherence-based beamforming technique with acoustic sub-aperture processing for the purposes of reducing `secondary' lobe artefacts, noise and increasing the effective frame rate. Using an {\it{in vitro}} cross tube, it was found that the procedure reduced the percentage of `false' locations from $\sim$26\% to $\sim$15\% compared to traditional orthogonal plane wave compounding. Additionally, it was found that the noise could be reduced by $\sim$7 dB and that the effective frame rate could be increased to over 4000 fps. Subsequently, {\it{in vivo}} ultrasound localisation microscopy was used to produce images non-invasively of a rabbit kidney and a human thyroid.

Medical Physics,Image and Video Processing
A single crystal row-column-array for 3D ultrasound imaging

Guo Li,Qiandong Sun,Yapeng Fu,Shilin Hou,Jiaming Zhang,K L Xu,J Y Dai

DOI: https://doi.org/10.1016/j.ultras.2024.107289

IF: 4.2

Ultrasonics

Abstract:In vivo 3D ultrasound imaging with 2D-array transducers is of great importance for both clinical application and biomedical research, but it is complicated in fabrication and also very expensive in hardware due to thousands of electronic channels. In this work, we demonstrate a new fabrication process of 7-MHz 128 + 128 elements row-column-array (RCA) transducer with relaxor ferroelectric PMN-0.28PT single crystal. With piezoelectric single crystal and improved acoustic matching, the optimized performance of -6 dB bandwidth of ∼82 % and insertion loss of -44.6 dB is achieved. The axial and lateral imaging resolutions at different depth of the RCA transducer are quantified by the point spread function (PSF), and the results are respectively 0.20 mm and 0.41 mm at the depth of 7.7 mm, and 0.22 mm and 0.47 mm at the depth of 16.7 mm. The transducer is validated experimentally on a hyperechoic phantom, and 3D view and slices of B-mode images are obtained. The experimental results indicate that our developed RCA transducer can obtain high-quality 3D ultrasound images, demonstrating great potential on ultrafast 3D and functional imaging.
A Miniature Multi-Functional Photoacoustic Probe.

Riqiang Lin,Jiaming Zhang,Wen Gao,Xiatian Wang,Shengmiao Lv,Kwok-Ho Lam,Xiaojing Gong

DOI: https://doi.org/10.3390/mi14061269

IF: 3.4

2023-01-01

Micromachines

Abstract:Photoacoustic technology is a promising tool to provide morphological and functional information in biomedical research. To enhance the imaging efficiency, the reported photoacoustic probes have been designed coaxially involving complicated optical/acoustic prisms to bypass the opaque piezoelectric layer of ultrasound transducers, but this has led to bulky probes and has hindered the applications in limited space. Though the emergence of transparent piezoelectric materials helps to save effort on the coaxial design, the reported transparent ultrasound transducers were still bulky. In this work, a miniature photoacoustic probe with an outer diameter of 4 mm was developed, in which an acoustic stack was made with a combination of transparent piezoelectric material and a gradient-index lens as a backing layer. The transparent ultrasound transducer exhibited a high center frequency of ~47 MHz and a −6 dB bandwidth of 29.4%, which could be easily assembled with a pigtailed ferrule of a single-mode fiber. The multi-functional capability of the probe was successfully validated through experiments of fluid flow sensing and photoacoustic imaging.
Ultrafast 3-D Transcutaneous Super Resolution Ultrasound Using Row-Column Array Specific Coherence-Based Beamforming and Rolling Acoustic Sub-aperture Processing: In Vitro, in Rabbit and in Human Study

Joseph Hansen-Shearer,Jipeng Yan,Marcelo Lerendegui,Biao Huang,Matthieu Toulemonde,Kai Riemer,Qingyuan Tan,Johanna Tonko,Peter D Weinberg,Chris Dunsby,Meng-Xing Tang

DOI: https://doi.org/10.1016/j.ultrasmedbio.2024.03.020

Abstract:Objective: This study aimed to realise 3-D super-resolution ultrasound imaging transcutaneously with a row-column array which has far fewer independent electronic channels and a wider field of view than typical fully addressed 2-D matrix arrays. The in vivo image quality of the row-column array is generally poor, particularly when imaging non-invasively. This study aimed to develop a suite of image formation and post-processing methods to improve image quality and demonstrate the feasibility of ultrasound localisation microscopy using a row-column array, transcutaneously on a rabbit model and in a human. Methods: To achieve this, a processing pipeline was developed which included a new type of rolling window image reconstruction, which integrated a row-column array specific coherence-based beamforming technique with acoustic sub-aperture processing. This and other processing steps reduced the 'secondary' lobe artefacts, and noise and increased the effective frame rate, thereby enabling ultrasound localisation images to be produced. Results: Using an in vitro cross tube, it was found that the procedure reduced the percentage of 'false' locations from ∼26% to ∼15% compared to orthogonal plane wave compounding. Additionally, it was found that the noise could be reduced by ∼7 dB and the effective frame rate was increased to over 4000 fps. In vivo, ultrasound localisation microscopy was used to produce images non-invasively of a rabbit kidney and a human thyroid. Conclusion: It has been demonstrated that the proposed methods using a row-column array can produce large field of view super-resolution microvascular images in vivo and in a human non-invasively.
Am Ultrasound-Modulated Optical Tomography with Real-Time Fft

Yong Yao,Da Xing,Yonghong He

DOI: https://doi.org/10.1007/bf02901160

2001-01-01

Abstract:We report on a novel ultrasound-modulated optical tomographic technique applied in dense tissue-simulating turbid media. A 1 MHz ultrasound beam is focused into the media to modulate and tag the scattering laser light passing through the ultrasonic focused zone. A 10 kHz sinusoidal wave, as a detection wave, is carried by the ultrasound beam through amplitude-modulation (AM). The scattering photons that come from the focused zone carry the modulated information, received by detector and demodulated by real-time fast Fourier transform (FFT). The optical tomographic images of the tissue simulating media and buried object are reconstructed with AM spectral intensity. This method can be applied to imaging three-dimensional tissue structures with different optical parameters. For the first time, we obtained the tomography of buried objects in biological tissue phantoms with a detecting depth of 30 mm.
Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array

Xu-Bo Wang,Le-Ming He,You-Cao Ma,Wen-Juan Liu,Wei-Jiang Xu,Jun-Yan Ren,Antoine Riaud,Jia Zhou

DOI: https://doi.org/10.3390/s21051823

IF: 3.9

2021-03-05

Sensors

Abstract:Piezoelectric micromachined ultrasonic transducers (PMUT) are promising elements to fabricate a two-dimensional (2D) array with a pitch small enough (approximately half wavelength) to form and receive arbitrary acoustic beams for medical imaging. However, PMUT arrays have so far failed to combine the wide, high-frequency bandwidth needed to achieve a high axial resolution. In this paper, a polydimethylsiloxane (PDMS) backing structure is introduced into the PMUTs to improve the device bandwidth while keeping a sub-wavelength (λ) pitch. We implement this backing on a 16 × 8 array with 75 μm pitch (3λ/4) with a 15 MHz working frequency. Adding the backing nearly doubles the bandwidth to 92% (−6 dB) and has little influence on the impulse response sensitivity. By widening the transducer bandwidth, this backing may enable using PMUT ultrasonic arrays for high-resolution 3D imaging.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation

High-frequency surface-micromachined optical ultrasound transducer array for 3D micro photoacoustic computed tomography

Characterization of a broadband all-optical ultrasound transducer-from optical and acoustical properties to imaging

Fine-Tuning of Optical Resonance Wavelength of Surface-Micromachined Optical Ultrasound Transducer Arrays for Single-Wavelength Light Source Readout

Transparent microfiber Fabry-Perot ultrasound sensor with needle-shaped focus for multiscale photoacoustic imaging

A Transparent Ultrasound Array for Real-Time Optical, Ultrasound, and Photoacoustic Imaging

High-Frequency Photoacoustic Measurements in Air

Highly sensitive self-focused ultrasound transducer with a bionic back-reflector for multiscale-resolution photoacoustic microscopy

Three-dimensional Photoacoustic Imaging Via Scanning a One Dimensional Linear Unfocused Ultrasound Array

Sub-Nyquist sampling-based high-frequency photoacoustic computed tomography

Single-side access, isotropic resolution and multispectral 3D photoacoustic imaging with rotate-translate scanning of ultrasonic detector array

Design and Fabrication of a Novel Dual-Frequency Confocal Ultrasound Transducer for Microvessels Super-Harmonic Imaging

Acousto-optic Tomography Using Amplitude-Modulated Focused Ultrasound and a Near-Ir Laser

A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging

Whispering-gallery Optical Microprobe for Photoacoustic Imaging

Photoacoustic raster scan imaging using an optomechanical ultrasound sensor in silicon photonics

Ultrafast 3-D Super Resolution Ultrasound using Row-Column Array specific Coherence-based Beamforming and Rolling Acoustic Sub-aperture Processing: In Vitro, In Vivo and Clinical Study

A single crystal row-column-array for 3D ultrasound imaging

A Miniature Multi-Functional Photoacoustic Probe.

Ultrafast 3-D Transcutaneous Super Resolution Ultrasound Using Row-Column Array Specific Coherence-Based Beamforming and Rolling Acoustic Sub-aperture Processing: In Vitro, in Rabbit and in Human Study

Am Ultrasound-Modulated Optical Tomography with Real-Time Fft

Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array