New methods of analyzing indentation experiments on very thin films

Han Li,N. Randall,J. Vlassak
DOI: https://doi.org/10.1557/JMR.2010.0095
2010-04-01
Abstract:Indentation experiments on thin films are analyzed by using a rigorous solution to model elastic substrate effects. Two cases are discussed: elastic indentations where film and substrate are anisotropic and elastoplastic indentations where significant material pileup occurs. We demonstrate that the elastic modulus of a thin film can be accurately measured in both cases, even if there is significant elastic mismatch between film and substrate.
Materials Science
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