Fabrication of ion-sliced yttrium-aluminum-garnet thin films on silica by He+ implantation and Cu–Sn bonding

Bingxi Xiang,Huangpu Han,Lei Wang,Yujie Ma,Meng Wang,Xintong Xu,Mingxia Qiu,Shuangchen Ruan
DOI: https://doi.org/10.1016/j.optmat.2020.110182
IF: 3.754
2020-11-01
Optical Materials
Abstract:<p>The fabrication of sub-micron-thickness ion-sliced yttrium-aluminum-garnet thin films on silica is performed by He<sup>+</sup> implantation and the Cu–Sn bonding. The formation of blisters on He-ion-implanted YAG crystals caused by thermal annealing is investigated. YAG thin films with an area of approximately 6 mm × 5 mm are produced. The implanted YAG crystals and fabricated YAG thin films are investigated using optical, transmission electron, and scanning electron microscopy, as well as prism-coupling methods. A YAG thin film with a low-refractive-index silica cladding can be used as a waveguide to manufacture photonic components with high refractive index contrast.</p>
materials science, multidisciplinary,optics
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