Abstract:Yttrium iron garnet (YIG: Y 3 Fe 5 O 12 ) is an ideal magnetic material with potential applications in microwave and spintronic devices. A key prerequisite for seamless integration into current semiconductor electronics is the growth of high-quality YIG films on substrates beyond isostructural Gadolinium gallium garnet. In this context, we present the successful fabrication of YIG thin films with varying thickness (70 ≤ t ≤ 380) on fused quartz substrates utilizing radio-frequency (rf) magnetron sputtering. The Rietveld refinement of the X-ray diffraction data uncovers the formation of body-centered cubic single-phase polycrystalline YIG with the space group of Ia-3d. Saturation magnetization (4πM S ) and coercivity (H C ), as determined by the physical property measurement system (PPMS), exhibit a dependence on the film's thickness (t). Remarkably, the film with t = 380 nm shows a 4πM S value of 1775, closely resembling the bulk YIG value, with an exceptionally low coercivity (H C < 5 Oe). From ferromagnetic resonance (FMR) measurements, the estimated effective saturation magnetization (4πM eff ) is found to be very much different from the 4πM S obtained from PPMS and is attributed to the presence of stressed-induced magnetic anisotropy (H K ) in YIG films. The FMR linewidth (ΔH) of the YIG films is found to be quite sensitive to H K and the minimum ΔH value of 80 Oe is observed in the film with the lowest H K . The findings indicate that YIG films deposited on quartz substrates have potential advantages for their application in semiconductor-integrated devices. Importantly, this study delves into the fundamental intricacies of YIG growth on non-garnet substrates and offers a well-optimized recipe for generating high-quality YIG thin films through RF sputtering.

Yttrium Iron Garnet Thin Films with Very Low Damping Obtained by Recrystallization of Amorphous Material

Nanometer-Thick Yttrium Iron Garnet Films with Extremely Low Damping

Chemical Epitaxial Growth of Nm-Thick Yttrium Iron Garnet Films with Low Gilbert Damping

Nanometer-Thick Yttrium Iron Garnet Films with Perpendicular Anisotropy and Low Damping

Pulsed laser deposition of epitaxial yttrium iron garnet films with low Gilbert damping and bulk-like magnetization

Nanoscale Ga/Al Substituted Yttrium Iron Garnet Films by Liquid Phase Epitaxy

Ultra-low damping in lift-off structured yttrium iron garnet thin films

Structural and Magnetic Properties of Y3(GaAlFe)5O12 Liquid-Phase Epitaxy Films with Low Ferromagnetic Resonance Losses

Ferromagnetic Resonance of Sputtered Yttrium Iron Garnet Nanometer Films

Pulsed Laser Deposition Grown Yttrium-Iron-garnet Thin Films: Effect of Composition and Iron Ion Valences on Microstructure and Magnetic Properties

Crystallization dynamics of amorphous yttrium iron garnet thin films

Optimizing the Quality of Epitaxial Y3Fe5O12 Thin Films Via a Two-Step Post-Annealing Process

Ferromagnetic resonances in single-crystal yttrium iron garnet nanofilms fabricated by metal-organic decomposition

The Room Temperature Deposition of High-Quality Epitaxial Yttrium Iron Garnet Thin Film Via RF Sputtering

A Strategy for More Reliably Obtaining Y3Fe5O12 Thin Films with Both Low Damping and Highly Spin Transparent Surface

Origin of high-frequency magnetic loss of Y3Fe5O12 single crystal thin films prepared with high-throughput screening by magnetron sputtering

Thickness Dependence of Magnetic Properties in Submicron Yttrium Iron Garnet Films

The 50 nm-thick yttrium iron garnet films with perpendicular magnetic anisotropy

Evolution of microstructure, magnetic and microwave properties of sputter deposited polycrystalline YIG thin films

Patterning Magnonic Structures via Laser Induced Crystallization of Yittrium Iron Garnet