Investigation of Molybdenum Doped ZnO Thin Films Prepared by Spray Pyrolysis Technique

V. Gokulakrishnan,S. Parthiban,K. Jeganathan,K. Ramamurthi
DOI: https://doi.org/10.1080/00150193.2011.620898
2011-01-01
Ferroelectrics
Abstract:Molybdenum doped zinc oxide thin films were deposited on the Corning glass substrates pre-heated to 400°C by spray pyrolysis technique. The effect of molybdenum doping concentration (0–2 at.%) on the structural and optical properties of zinc oxide thin films was studied. X-ray diffraction analysis confirmed that the molybdenum doped ZnO films belong to the hexagonal crystal structure of ZnO. Atomic force microscopic studies revealed the effect of molybdenum doping on the surface morphology of these films. The 1 at.% Mo doped ZnO exhibited highest average transmittance of ∼87% in the visible region (400–800 nm). Optical bandgap energy of the ZnO and Mo doped ZnO films lies in the range of 3.28–3.33 eV. Annealing of the high resistive ZnO and Mo doped ZnO films at 400°C in vacuum for 60 min improved their resistivity. The minimum resistivity of 4.7 × 10−2 Ω cm and the maximum carrier concentration of 1.27 × 1019 cm−3 were achieved for 1 at.% Mo doped ZnO films.
materials science, multidisciplinary,physics, condensed matter
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