Abstract:The temperature dependency of femtosecond laser induced surface structures opens up a new scenario for studying ultrafast laser-mater interaction on the surface and a novel method for controlling the features of these structures. The shape and crystallinity of micro/nano surface structures created by femtosecond laser irradiation of n-type silicon (100) at elevated temperatures were compared in this study. Low spatial frequency laser induced periodic ripples structures (LSFL), micrometer-sized grooves, and spikes occur at room temperature as the number of pulses increases. At 400 °C, however, the grooves parallel to the polarization are the dominant structures, notwithstanding the presence of LSFL. As the temperature rises, the periodicities of LSFL increase, which we believe is due to a reduction in the oscillation of the surface plasmon polaritons due to the increased damping rate at higher temperatures. Furthermore, Raman spectra reveal that surface structures generated at 400 °C have higher crystallinity than those formed at 25 °C. Our simulations show that the better crystallinity at high temperatures is due to a slower resolidification velocity which is caused by a smaller temperature gradient and higher energy absorption. Our findings demonstrate that the features of femtosecond laser induced surface structures, such as periodicity and crystallinity, can be controlled by adjusting the substrate temperature simultaneously, paving the way for high crystallinity surface micro/nano-structures.

High-density nanodot structures on silicon solar cell surfaces irradiated by ultraviolet laser pulses below the melting threshold fluence

Laser microstructuring of Si surfaces for low-threshold field-electron emission

Effect of Laser Fluence on the Properties of Microstructured Silicon Solar Cells

Combined Continuum-Atomistic Modeling of Ultrashort-Pulsed Laser Irradiation of Silicon

Effects of the Irradiation on Silicon by Femtosecond Laser of Various Energy Densities

Research of laser irradiation effect on monocrystalline silicon solar cells and single junction GaAs solar cells

Comparison study of the femtosecond laser-induced surface structures on silicon at an elevated temperature.

Strong Mid-Infrared Absorption and High Crystallinity of Microstructured Silicon Formed by Femtosecond Laser Irradiation in NF3 Atmosphere

Observation of Femtosecond Laser-Induced Ablation in Crystalline Silicon

Mechanism of Femtosecond-Laser-induced Periodic Nanostructure Formation on Crystalline Silicon Surface Immersed in Water

Preparation of a Single Layer of Luminescent Nanocrystalline Si Structures by Laser Irradiation Method

Damage threshold research of monocrystalline silicon solar cells under femtosecond laser illumination

High Density Si Nanodots-Fabrication and Properties

Femtosecond Laser Induced Nanocone Structure and Simultaneous Crystallization of 1.6 Μm Amorphous Silicon Thin Film for Photovoltaic Application

Effect of high-power nanosecond and femtosecond laser pulses on silicon nanostructures

The Experimental and Modeling Study of Femtosecond Laser-Ablated Silicon Surface

Study on Radiation Damage of Silicon Solar Cell Electrical Parameters by Nanosecond Pulse Laser

Femtosecond Laser-Induced Mesoporous Structures on Silicon Surface

Silicon Surface Morphologies after Femtosecond Laser Irradiation

Femtosecond-Laser-Ablation Dynamics in Silicon Revealed by Transient Reflectivity Change

Femtosecond Laser-Induced Cross-Periodic Structures on A Crystalline Silicon Surface under Low Pulse Number Irradiation