Effect of target peak power density on the phase formation, microstructure evolution, and mechanical properties of Cr2AlC MAX-phase coatings

Holger Rueß,Jonas Werner,Yeliz Unutulmazsoy,Jürgen W. Gerlach,Xiang Chen,Bastian Stelzer,Denis Music,Szilard Kolozsvari,Peter Polcik,Thomas E. Weirich,Jochen M. Schneider
DOI: https://doi.org/10.1016/j.jeurceramsoc.2020.10.072
IF: 5.7
2021-03-01
Journal of the European Ceramic Society
Abstract:<p>The applicability of Cr<sub>2</sub>AlC MAX-phases as protective coatings in energy conversion or aerospace applications requires a dense, single-phase structure. Therefore, we study the effect of target power density and substrate bias on phase formation, microstructure evolution, and mechanical properties of Cr<sub>2</sub>AlC coatings utilizing direct current (DCMS) and high-power pulsed magnetron sputtering (HPPMS). Generally, HPPMS results in coatings with superior density and hence larger elastic moduli compared to DCMS, indicating that ion bombardment by ionized film-forming species is beneficial. However, decreasing the substrate bias to −200 V for DCMS and −100 V for HPPMS favors the ion bombardment induced formation of the disordered (Cr,Al)<sub>2</sub>C<sub>x</sub> solid solution. It is evident that there is an optimum moderate ion energy for the formation of dense Cr<sub>2</sub>AlC coatings. Too low energy results in the formation of under-dense coatings. Too high energy yields the formation of (Cr,Al)<sub>2</sub>C<sub>x</sub> in addition to Cr<sub>2</sub>AlC.</p>
materials science, ceramics
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