Evaluation of LEC and VGF-InAs substrates through surface defect characterization and epitaxy growth

Lijie Liu,Youwen Zhao,Yong Huang,Yu Zhao,Hui Xie,Jun Wang,Yingli Wang,Guiying Shen
DOI: https://doi.org/10.1016/j.mssp.2020.105624
IF: 4.1
2021-04-01
Materials Science in Semiconductor Processing
Abstract:Undoped InAs (100) substrate wafers prepared by liquid encapsulated Czochralski (LEC) and vertical temperature gradient freezing (VGF) methods have been studied and compared in their epi-ready state. The substrate surface defects have been analyzed by surface scanner KLA candela, Energy Dispersive X-Ray Spectroscopy (EDAX), Total-reflection X-ray fluorescence spectroscopy (TXRF), with an aim to find the contrast between LEC-InAs and VGF-InAs substrates. It is found that the VGF wafers have lower surface point defects and good stoichiometry compared with the LEC-wafer. VGF-InAs is more favorable to LEC-InAs for oxide thermal desorption and midwavelength infrared(MWIR)epitaxial layer growth with low defect density.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied
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