Photodetection properties of β-Ga2O3/n-Si isotype heterojunction for solar-blind ultraviolet photodetector

Daqiang Hu,Ying Wang,Yandong Wang,Weiliang Huan,Xin Dong,Jingzhi Yin
DOI: https://doi.org/10.1016/j.matlet.2022.131653
IF: 3
2022-04-01
Materials Letters
Abstract:In this study, β-Ga2O3/n-Si isotype heterojunction was fabricated to form a solar-blind ultraviolet photodetector by depositing β-Ga2O3 film on n-type Si substrate using metal-organic chemical vapor deposition. Photodetection properties of the photodetector were investigated systematically. The fabricated isotype heterojunction photodetector exhibited typical rectifying characteristics and excellent light on-off switching performance. Under 254 nm illumination, the photodetector showed the photo-to-dark current ratio of 591.38 at −20 V bias. Meanwhile, fast response speed with rise time ( τ r 1 , τ r 2 ) of (0.20 s, 1.81 s) and decay time ( τ d 1 , τ d 2 ) of (0.02 s, 5.12 s) at −20 V bias was obtained. The results indicate that the photodetector based on β-Ga2O3/n-Si isotype heterojunction has excellent sensitivity and selectivity to solar-blind ultraviolet light.
materials science, multidisciplinary,physics, applied
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