Abstract:Hexagonal boron nitride (hBN)-long-known as a thermally stable ceramic-is now available as atomically smooth, single-crystalline flakes, revolutionizing its use in optoelectronics. For nanophotonics, these flakes offer strong nonlinearities, hyperbolic dispersion, and single-photon emission, providing unique properties for optical and quantum-optical applications. For nanoelectronics, their pristine surfaces, chemical stability, and wide bandgap have made them the key substrate, encapsulant, and gate dielectric for two-dimensional electronic devices. However, while exploring these advantages, researchers have been restricted to flat flakes or those patterned with basic slits and holes, severely limiting advanced architectures. If freely varying flake profiles were possible, the hBN structure would present a powerful design parameter to further manipulate the flow of photons, electrons, and excitons in next-generation devices. Here, we demonstrate freeform nanostructuring of hBN by combining thermal scanning-probe lithography and reactive-ion etching to shape flakes with surprising fidelity. We leverage sub-nanometer height control and high spatial resolution to produce previously unattainable flake structures for a broad range of optoelectronic applications. For photonics, we fabricate microelements and show the straightforward transfer and integration of such elements by placing a spherical hBN microlens between two planar mirrors to obtain a stable, high-quality optical microcavity. We then decrease the patterning length scale to introduce Fourier surfaces for electrons, creating sophisticated, high-resolution landscapes in hBN, offering new possibilities for strain and band-structure engineering. These capabilities can advance the discovery and exploitation of emerging phenomena in hyperbolic metamaterials, polaritonics, twistronics, quantum materials, and 2D optoelectronic devices.

Optical thickness determination of hexagonal boron nitride flakes

Thickness Identification of 2D Hexagonal Boron Nitride Thin Flakes by Optical Imaging in Dry Transfer Method

Large scale growth and characterization of atomic hexagonal boron nitride layers.

Optical Contrast for Identifying the Thickness of Two-Dimensional Materials

Thickness-Dependent Cross-Plane Thermal Conductivity Measurements of Exfoliated Hexagonal Boron Nitride

Characterization methods dedicated to nanometer-thick hBN layers

Optical identification of atomically thin dichalcogenide crystals

Unambiguous identification of the indirect band nature of atomically thin hexagonal boron nitride

The Numerical-Aperture-Dependent Optical Contrast and Thickness Determination of Ultrathin Flakes of Two-Dimensional Atomic Crystals: A Case of Graphene Multilayers

Long Phonon Mean Free Paths Observed in Cross-plane Thermal-Conductivity Measurements of Exfoliated Hexagonal Boron Nitride

Optical image-based thickness characterization of atomically thin nanomaterials using computer vision techniques

Characterization Of Two-Dimensional Hexagonal Boron Nitride Using Scanning Electron And Scanning Helium Ion Microscopy

Probing Electronic Properties of CVD Monolayer Hexagonal Boron Nitride by an Atomic Force Microscope

Anisotropic Optical Properties of Hexagonal Boron Nitride Thin Films

Characterization of hexagonal boron nitride layers on nickel surfaces by low-energy electron microscopy

Hunting for monolayer boron nitride: optical and Raman signatures

Hexagonal boron nitride nanophotonics

Millimeter-scale exfoliation of hBN with tunable flake thickness

Large few-layer hexagonal boron nitride flakes for nonlinear optics

Freeform nanostructuring of hexagonal boron nitride

Atomic-Scale Structural and Chemical Characterization of Hexagonal Boron Nitride Layers Synthesized at the Wafer-Scale with Monolayer Thickness Control