The other model antiferroelectric: PbHfO 3 thin films from ALD precursors

Brendan Hanrahan,Cosme Milesi-Brault,Asher Leff,Alexis Payne,Shi Liu,Mael Guennou,Nicholas Strnad
DOI: https://doi.org/10.1063/5.0035730
IF: 6.6351
2021-02-01
APL Materials
Abstract:Antiferroelectric PbHfO<sub>3</sub> is grown from atomic layer deposition precursors lead bis(dimethylaminomethylpropanolate) and tetrakis dimethylamino hafnium with H<sub>2</sub>O and O<sub>3</sub> oxidizers in thicknesses from 20 nm to 200 nm at a substrate temperature of 250 °C. X-ray analysis shows an as-grown crystalline PbO phase that diffuses into an amorphous HfO<sub>2</sub> matrix upon annealing to form a randomly oriented, orthorhombic PbHfO<sub>3</sub> thin film. Electrical characterization reveals characteristic double hysteresis loops with maximum polarizations of around 30 <i>µ</i>C/cm<sup>2</sup> and transition fields of 350 kV/cm–500 kV/cm depending on the thickness. Temperature-dependent permittivity and polarization testing show a phase transition at 185 °C, most probably to the paraelectric phase, but give no clear evidence for the intermediate phase known from bulk PbHfO<sub>3</sub>. The energy storage density for the films reaches 16 J/cm<sup>3</sup> at 2 MV/cm. A dielectric tunability of 221% is available within 1 V for the thinnest film. These results highlight the unique spectrum of properties available for thin film perovskite antiferroelectrics.
materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology
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