Abstract:Drawing inspiration from modern integrated circuit systems composed of various electronic components built on a single silicon platform, the emerging integrated photonics can also follow a similar trend in the pursuit of expanded optical functionalities in constructing compact optoelectronic systems. Herein, vertically integrated a micro-scale light-emitting diode (micro-LED) array with a photodetector (PD) side-by-side through a transparent sapphire substrate is proposed. The downward emitted photons from the micro-LEDs can easily transmit through the transparent sapphire and then be captured by the PD fabricated on the backside of the sapphire. Additionally, by integrating a feedback electrical circuit, a self-stabilized light output power is demonstrated from the micro-LED array in such vertically integrated LED/PD architecture, which cannot only monitor the fluctuation of light intensity from the micro-LED array over time but also provide a constant output feedback to ensure a stable light output power. Such a compact and stable DUV light source composed of micro-LED array is then employed for constructing a DUV maskless photolithography system. To best of our knowledge, this is the first demonstration of maskless photolithography based on DUV micro-LED active matrix. The proposed vertically-stacked optical device architecture by leveraging the transparent substrate offers a new path toward the realization of future integrated photonic systems. A micro-scale light-emitting diode (micro-LED) array is vertically integrated with a photodetector (PD) side-by-side through a transparent sapphire substrate. By integrating a feedback electrical circuit, a self-stabilized light output power from the micro-LED array in such vertically integrated LED/PD architecture is realized. Such a DUV micro-LED array is then employed for compact DUV maskless photolithography applications. image

High-power AlGaN deep-ultraviolet micro-light-emitting diode displays for maskless photolithography

Vertically Integrated Self-Monitoring AlGaN-Based Deep Ultraviolet Micro-LED Array with Photodetector Via a Transparent Sapphire Substrate Toward Stable and Compact Maskless Photolithography Application

Efficient DUV Micro-Led and Arrays for Various Applications

Efficiency boosting of 236 nm AlGaN-based micro-LEDs

3.2: Elevating the Light Output Power Density of Scaling‐down AlGaN Ultraviolet‐C Micro‐LED

Highly efficient AlGaN-based deep-ultraviolet light-emitting diodes: from bandgap engineering to device craft

Enhancing the optical and electrical properties of AlGaN ultraviolet-C micro-LED via a hybrid scheme of plasma and chemical treatment

AlGaN-Based Deep-UV Micro-LED Array for Quantum Dots Converted Display With Ultra-Wide Color Gamut

Maskless photolithography based on ultraviolet micro-LEDs and direct writing method for improving pattern resolution

AlGaN-based Deep Ultraviolet Micro-Led Emitting at 275 Nm.

Improved light extraction efficiency of AlGaN DUV light emitting diodes using Al/MgF 2 -based highly reflective film

275 nm Deep Ultraviolet AlGaN-Based Micro-LED Arrays for Ultraviolet Communication

High Wall-Plug Efficiency AlGaN Deep Ultraviolet Micro-LEDs Enabled by an Etched Reflective Array Design for High Data Transmission

AlGaN multiple quantum well deep‐ultraviolet micro‐light‐emitting diodes for high color conversion efficiency quantum dots display

P‐8.6: Elimination of Nanorods by Tetramethylammonium Hydroxide for the Fabrication of AlGaN‐based UV‐C Micro‐LED Array

High-quality AlGaN Epitaxial Structures and Realization of UVC Vertical-Cavity Surface-Emitting Lasers

Breaking the Transverse Magnetic-Polarized Light Extraction Bottleneck of Ultraviolet-C Light-Emitting Diodes Using Nanopatterned Substrates and an Inclined Reflector

AlGaN Ultraviolet Micro-LEDs

150 mW deep-ultraviolet light-emitting diodes with large-area AlN nanophotonic light-extraction structure emitting at 265 nm

60‐4: Minimal Efficiency Degradation and Elevated Radiometric Power Density of Ultraviolet‐A Micro‐LED with Homoepitaxial Structure

Enhancing external quantum efficiency of deep ultraviolet micro-LEDs through geometry design and multi-physics field coupling analysis