275 nm Deep Ultraviolet AlGaN-Based Micro-LED Arrays for Ultraviolet Communication

Liang Guo,Yanan Guo,Jiankun Yang,Jianchang Yan,Jianguo Liu,Junxi Wang,Tongbo Wei
DOI: https://doi.org/10.1109/jphot.2021.3129648
IF: 2.4
2022-02-01
IEEE Photonics Journal
Abstract:In this work, we fabricated and characterized 44 parallel flip-chip AlGaN-based micro-LED arrays with varied mesa diameters of 120m, 100m, 80m, and 60m. The reported micro-LED arrays have a maximum bandwidth of 380MHz and a peak wavelength of 275nm. It is found that the electrical and optical characteristics of AlGaN-based micro-LED arrays show strong size dependence for ultraviolet communication (UVC). The differential resistance increases from 28.8 to 112 , the external quantum efficiency (EQE) is increased by 30, and the bandwidth doubles as the diameter of individual micro-LED decreases from 120m to 60m. Our research proves that tailoring the mesa size of parallel flip-chip AlGaN-based micro-LED arrays can further enhance its bandwidth and promote its application in UVC.
engineering, electrical & electronic,optics,physics, applied
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