Thermal barrier effect from internal pore channels on thickened aluminum nanofilm

Lin Qiu,Yuxin Ouyang,Yanhui Feng,Xinxin Zhang,Xiaotian Wang,Jin Wu
DOI: https://doi.org/10.1016/j.ijthermalsci.2020.106781
IF: 4.779
2021-04-01
International Journal of Thermal Sciences
Abstract:<p>High thermal conductivity nanofilms play a key role in the heat dissipation of microdevices, and the preparation process greatly influences the thermal conductivity of the nanofilms. In this study, four Al nanofilms with different thicknesses were fabricated via the electron beam evaporation method, and their effective thermal conductivity (ETC) values were measured using a specially designed microsensor-based third harmonic 3<em>ω</em> method. Due to the internal pore channels and nanometer-level feature size, the ETC of nanofilms exhibited a downward trend when the thickness increases. Significantly, the pores produced by the preparation induce the electron-phonon nonequilibrium effect inside the film, resulting in an anomalous change of the film thermal conductivity versus the thickness.</p>
engineering, mechanical,thermodynamics
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