Size Effects in Internal Friction of Nanocrystalline Aluminum Films

Nhat Minh Dang,Zhao-Ying Wang,Yun-Chia Chou,Tra Anh Khoa Nguyen,Thien Ngon Dang,Ming-Tzer Lin
DOI: https://doi.org/10.3390/ma14123401
IF: 3.4
2021-06-19
Materials
Abstract:Al thin film is extensively used in micro-electromechanical systems (MEMS) and electronic interconnections; however, most previous research has concentrated on their quasi-static properties and applied their designs on larger scales. The present study designed a paddle-like cantilever specimen with metal films deposited on the upper surface to investigate the quasi-static properties of Al thin film at room temperature under high vacuum conditions at microscopic scales. Energy loss was determined using a decay technique in the oscillation amplitude of a vibrating structure following resonant excitation. Grain size and film thickness size were strictly controlled considering the quasi-static properties of the films. This study found that the internal friction of ultra-thin and thin Al films was more dependent on the grain boundaries than film thickness.
materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,metallurgy & metallurgical engineering
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