Toughening thin-film structures with ceramic-like amorphous silicon carbide films.

S. King,I. Ryu,Y. Matsuda,J. Bielefeld,R. Dauskardt
DOI: https://doi.org/10.1002/smll.201300130
IF: 13.3
Small
Abstract:A significant improvement of adhesion in thin-film structures is demonstrated using embedded ceramic-like amorphous silicon carbide films (a-SiC:H films). a-SiC:H films exhibit plasticity at the nanoscale and outstanding chemical and thermal stability unlike most materials. The multi-functionality and the ease of processing of the films have potential to offer a new toughening strategy for reliability of nanoscale device structures.
Physics,Engineering,Medicine,Materials Science
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