Asymmetrical De-Embedding Method for Millimeter-Wave On-Wafer Measurement

Liang Zhou,Liangfeng Qiu,Liyun Shi
DOI: https://doi.org/10.1109/ICEMI59194.2023.10270586
2023-08-09
Abstract:In order to accurate characterize millimeter wave IC circuits, de-embedding methods have been proposed to eliminate the parasitic effects of test fixtures. L-2L de-embedding method has been wildly applied to RF on wafer measurement due to its convenience. However its accuracy is not acceptable at very high frequencies. This is largely because its equivalent circuit model is symmetric, which is too simple to describe the RF pads parasitic effects. In this paper, an asymmetrical de-embedding method for millimeter-wave measurement is proposed based on traditional L-2L de-embedding method. The proposed method takes asymmetry into account when extracting parasitic parameters. It overcomes the disadvantage of the conventional de-embedding method. The equivalent-circuit and analysis methods are also given. An asymmetrical transmission line and its de-embedding fixture are fabricated with photosensitive composite film via a multilayer wiring process. The de-embedded results show that the proposed method is more accurate than the traditional L-2L method.
Engineering,Physics
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