Evaluation of the Distributed Deembedding Methods for 40ghz CMOS Transistor On-Wafer Characterization

Yang Cao,Wei Zhang,Jun Fu,Nianhong Liu,Quan Wang,Linlin Liu,Wei Zhou,Hongbo Ye
DOI: https://doi.org/10.1109/edssc.2017.8126405
2017-01-01
Abstract:In this paper, we evaluate the distributed deembedding methods in comparison with open-short deembedding technique for CMOS transistor on wafer characterization up to 40GHz. A set of NMOS transistor test structures fabricated on HLMC 40nm RF CMOS process are used for the investigation. Experimental results show the distributed methods are more physically reasonable than open-short deembedding technique at millimeter wave frequencies.
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