Measurement Range Enhancement of a Scanning Probe by the Real Time Adjustment of the Interferometer Reference Mirror

Lian-Sheng Zhang,You Tang,He Luan,Rui-Jun Li,Qiang-Xian Huang,Kuang-Chao Fan

DOI: https://doi.org/10.1109/jsen.2021.3116122

IF: 4.3

2021-11-01

IEEE Sensors Journal

Abstract:Scanning probes on the micro/nano-coordinate measuring machines (micro/nano-CMMs) can produce on/off signals and achieve 3D measurement ability within a specific range. The authors have developed several scanning probes based on a 2D angle sensor and a miniature Michelson interferometer that can work within ± <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="12.408ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 5342.5 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-31"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use> <use xlink:href="#MJMATHI-6D" x="1251" y="0"></use> <use xlink:href="#MJMATHI-75" x="2129" y="0"></use> <use xlink:href="#MJMATHI-74" x="2702" y="0"></use> <use xlink:href="#MJMATHI-65" x="3063" y="0"></use> <use xlink:href="#MJMATHI-78" x="3530" y="0"></use> <use xlink:href="#MJMATHI-74" x="4102" y="0"></use> <use xlink:href="#MJMATHI-6D" x="4464" y="0"></use></g></svg></span> . When the probe's lateral displacement is greater than <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="12.408ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 5342.5 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-31"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use> <use xlink:href="#MJMATHI-6D" x="1251" y="0"></use> <use xlink:href="#MJMATHI-75" x="2129" y="0"></use> <use xlink:href="#MJMATHI-74" x="2702" y="0"></use> <use xlink:href="#MJMATHI-65" x="3063" y="0"></use> <use xlink:href="#MJMATHI-78" x="3530" y="0"></use> <use xlink:href="#MJMATHI-74" x="4102" y="0"></use> <use xlink:href="#MJMATHI-6D" x="4464" y="0"></use></g></svg></span> , the interferometer signal is easy to break, limiting the measurement range of these probes. A 2D angle fine-tuning stage using piezoelectric stack actuators is designed to adjust the reference mirror in real-time to solve signal separation between the reference beam and the measuring beam of the miniature Michelson interferometer. The coupling of the 2D angle fine-tuning stage in the x and y directions is analyzed, and the coupling model is established for a relatively precise compensation. Experimental results show that through the proposed 2D angle fine-tuning stage, the measurement range of the probe can be extended to ± <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="12.408ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 5342.5 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-33"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use> <use xlink:href="#MJMATHI-6D" x="1251" y="0"></use> <use xlink:href="#MJMATHI-75" x="2129" y="0"></use> <use xlink:href="#MJMATHI-74" x="2702" y="0"></use> <use xlink:href="#MJMATHI-65" x="3063" y="0"></use> <use xlink:href="#MJMATHI-78" x="3530" y="0"></use> <use xlink:href="#MJMATHI-74" x="4102" y="0"></use> <use xlink:href="#MJMATHI-6D" x="4464" y="0"></use></g></svg></span> , and the interference signal can still remain stable and 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engineering, electrical & electronic,instruments & instrumentation,physics, applied